Inventor · disambiguated record
Noriaki Nakayamada
Also filed as: NAKAYAMADA NORIAKI
26 granted patents·5 pending applications·94 citations·filing 2000–2024
94Inventor score
Top patents by PatentIndex Score
31 records- 0192US8178856B2Charged particle beam writing apparatus and method thereofNAKAYAMADA NORIAKI·Filed 2010·Granted May 15, 2012·22 cites·10 claims
- 0291US8563953B2Charged particle beam writing apparatus and charged particle beam writing methodNAKAYAMADA NORIAKI·Filed 2011·Granted Oct 22, 2013·10 cites·10 claims
- 0385US8129698B2Charged-particle beam writing method and charged-particle beam writing apparatusNAKAYAMADA NORIAKI·Filed 2009·Granted Mar 6, 2012·9 cites·20 claims
- 0483US11961708B2Charged particle beam writing apparatus, charged particle beam writing method, and a non-transitory computer-readable storage mediumNUFLARE TECHNOLOGY INC·Filed 2021·Granted Apr 16, 2024·1 cites·14 claims
- 0582US11327408B2Writing data generating method and multi charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2019·Granted May 10, 2022·2 cites·4 claims
- 0682US9224578B2Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beamNUFLARE TECHNOLOGY INC·Filed 2014·Granted Dec 29, 2015·6 cites·11 claims
- 0782US7705327B2Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithographyNUFLARE TECHNOLOGY INC·Filed 2007·Granted Apr 27, 2010·8 cites·6 claims
- 0881US8502175B2Charged particle beam pattern forming apparatus and charged particle beam pattern forming methodNAKAYAMADA NORIAKI·Filed 2011·Granted Aug 6, 2013·5 cites·10 claims
- 0980US11199781B2Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording mediumNUFLARE TECHNOLOGY INC·Filed 2018·Granted Dec 14, 2021·2 cites·10 claims
- 1078US10410830B2Charged particle beam apparatus and positional displacement correcting method of charged particle beamNUFLARE TECHNOLOGY INC·Filed 2017·Granted Sep 10, 2019·2 cites·9 claims
- 1178US9336988B2Multi charged particle beam writing apparatus, and multi charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted May 10, 2016·3 cites·11 claims
- 1276US9779913B2Charged particle beam drawing apparatus and drawing data generation methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Oct 3, 2017·2 cites·18 claims
- 1375US11789372B2Writing data generating method and multi charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2022·Granted Oct 17, 2023·0 cites·8 claims
- 1475US10685435B2Drawing data generating methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Jun 16, 2020·2 cites·13 claims
- 1575US6346354B1Pattern writing methodTOSHIBA KK·Filed 2000·Granted Feb 12, 2002·12 cites·10 claims
- 1674US9852885B2Charged particle beam writing method, and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Dec 26, 2017·2 cites·10 claims
- 1774US9484185B2Charged particle beam writing apparatus, and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Nov 1, 2016·2 cites·10 claims
- 1872US10950413B2Electron beam irradiation method, electron beam irradiation apparatus, and computer readable non-transitory storage mediumNUFLARE TECHNOLOGY INC·Filed 2019·Granted Mar 16, 2021·1 cites·10 claims
- 1971US10236160B2Electron beam apparatus and positional displacement correcting method of electron beamNUFLARE TECHNOLOGY INC·Filed 2017·Granted Mar 19, 2019·1 cites·9 claims
- 2071US9164044B2Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing dataNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 20, 2015·2 cites·5 claims
- 2170US11774860B2Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording mediumNUFLARE TECHNOLOGY INC·Filed 2021·Granted Oct 3, 2023·0 cites·4 claims
- 2266US2024412945A1Electron beam writing method, electron beam writing apparatus, and non-transitory material computer-readable storage medium with programs stored thereinNUFLARE TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 2365US12456601B2Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording mediumNUFLARE TECHNOLOGY INC·Filed 2023·Granted Oct 28, 2025·0 cites·14 claims
- 2465US11804361B2Charged particle beam writing method, charged particle beam writing apparatus, and computer-readable recording mediumNUFLARE TECHNOLOGY INC·Filed 2022·Granted Oct 31, 2023·0 cites·9 claims
- 2553US2013032707A1Charged particle beam drawing apparatus and electrical charging effect correction method thereofNAKAYAMADA NORIAKI·Filed 2012·Application pending·0 cites
- 2653US2023029715A1Charged particle beam writing method and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2022·Application pending·0 cites
- 2753US2006147822A1Appartus and method for forming patternTOSHIBA KK·Filed 2006·Application pending·0 cites
- 2850US2011121208A1Charged particle beam drawing apparatus and electrical charging effect correction method thereofNUFLARE TECHNOLOGY INC·Filed 2010·Application pending·0 cites
- 2944US9268234B2Charged particle beam lithography apparatus and charged particle beam pattern writing methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Feb 23, 2016·0 cites·12 claims
- 3044US7036980B2Apparatus and method for forming patternTOSHIBA MACHINE CO LTD·Filed 2002·Granted May 2, 2006·0 cites·14 claims
- 3134US10032603B2Charged particle beam lithography apparatus and charged particle beam lithography methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Jul 24, 2018·0 cites·2 claims
Join the waitlist — get patent alerts
Get an alert when Noriaki Nakayamada files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →