Inventor · disambiguated record
Noboru Tokumasu
Also filed as: TOKUMASU NOBORU
23 granted patents·2 pending applications·2,176 citations·filing 1985–2002
97Inventor score
Files withCANON SALES CO INC14SEMICONDUCTOR PROCESS LAB CO4APPLIED MATERIALS JAPAN2SEMICONDUCTOR PROCESS LAB2ALCAN TECH CO INC1
Top patents by PatentIndex Score
25 records- 0197US6212789B1Semiconductor device manufacturing systemCANON SALES CO INC·Filed 1998·Granted Apr 10, 2001·543 cites·17 claims
- 0297US5915200AFilm forming method and semiconductor device manufacturing methodCANON SALES CO INC·Filed 1997·Granted Jun 22, 1999·335 cites·20 claims
- 0397US5314538AApparatus for manufacturing semiconductor device and method for manufacturing semiconductor deviceSEMICONDUCTOR PROCESS LAB·Filed 1992·Granted May 24, 1994·433 cites·3 claims
- 0494US5554570AMethod of forming insulating filmCANON SALES CO INC·Filed 1995·Granted Sep 10, 1996·185 cites·19 claims
- 0594US4702936AGas-phase growth processAPPLIED MATERIALS JAPAN·Filed 1985·Granted Oct 27, 1987·129 cites·6 claims
- 0692US5387546AMethod for manufacturing a semiconductor deviceCANON SALES CO INC·Filed 1992·Granted Feb 7, 1995·100 cites·19 claims
- 0788US5800877AMethod for forming a fluorine containing silicon oxide filmCANON SALES CO INC·Filed 1996·Granted Sep 1, 1998·96 cites·10 claims
- 0875US4731255AGas-phase growth process and an apparatus for the sameAPPLIED MATERIALS JAPAN·Filed 1985·Granted Mar 15, 1988·30 cites·22 claims
- 0970US6255230B1Method for modifying a film forming surface of a substrate on which a film is to be formed, and method for manufacturing a semiconductor device using the sameCANON SALES CO INC·Filed 1999·Granted Jul 3, 2001·41 cites·13 claims
- 1070US5051380AProcess for producing semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1990·Granted Sep 24, 1991·45 cites·2 claims
- 1169US5484749AManufacturing method of semiconductor deviceALCAN TECH CO INC·Filed 1995·Granted Jan 16, 1996·42 cites·9 claims
- 1269US5376591AMethod for manufacturing semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1992·Granted Dec 27, 1994·44 cites·18 claims
- 1366US5834730APlasma processing equipment and gas discharging deviceCANON SALES CO INC·Filed 1997·Granted Nov 10, 1998·32 cites·23 claims
- 1459US5231058AProcess for forming cvd film and semiconductor deviceSEMICONDUCTOR PROCESS LAB CO·Filed 1990·Granted Jul 27, 1993·30 cites·2 claims
- 1555US5324539AMethod for forming CVD thin glass filmsSEMICONDUCTOR PROCESS LAB·Filed 1992·Granted Jun 28, 1994·27 cites·14 claims
- 1649US6472330B1Method for forming an interlayer insulating film, and semiconductor deviceCANON SALES CO INC·Filed 2000·Granted Oct 29, 2002·3 cites·9 claims
- 1749US6432839B2Film forming method and manufacturing method of semiconductor deviceCANON SALES CO INC·Filed 2001·Granted Aug 13, 2002·2 cites·15 claims
- 1848US6110814AFilm forming method and semiconductor device manufacturing methodCANON SALES CO INC·Filed 1999·Granted Aug 29, 2000·13 cites·17 claims
- 1946US5952157AMethod for removal of resist film and method for production of semiconductor deviceCANON SALES CO INC·Filed 1997·Granted Sep 14, 1999·9 cites·13 claims
- 2044US5532193AMethod for forming insulating filmCANON SALES CO INC·Filed 1994·Granted Jul 2, 1996·13 cites·12 claims
- 2143US6221755B1Film formation method and manufacturing method of semiconductor deviceCANON SALES CO INC·Filed 1999·Granted Apr 24, 2001·9 cites·10 claims
- 2242US5569499AMethod for reforming insulating filmSEMICONDUCTOR PROCESS LAB CO·Filed 1994·Granted Oct 29, 1996·11 cites·10 claims
- 2335US6372650B2Method of cleaning substrate and method of manufacturing semiconductor deviceCANON SALES CO INC·Filed 1998·Granted Apr 16, 2002·4 cites·11 claims
- 2435US2002068377A1Method of forming a film of a semiconductor deviceFiled 2002·Application pending·0 cites
- 2531US2002062845A1Semiconductor manufacturing system and method for cleaning the sameCANON SALES CO LTD·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →