Inventor · disambiguated record
Olkan Cuvalci
Also filed as: CUVALCI OLKAN
12 granted patents·5 pending applications·70 citations·filing 2004–2014
89Inventor score
Top patents by PatentIndex Score
17 records- 0191US9490150B2Substrate support for substrate backside contamination controlTZU GWO-CHUAN·Filed 2012·Granted Nov 8, 2016·17 cites·18 claims
- 0289US9633889B2Substrate support with integrated vacuum and edge purge conduitsAPPLIED MATERIALS INC·Filed 2013·Granted Apr 25, 2017·10 cites·20 claims
- 0389US8146896B2Chemical precursor ampoule for vapor deposition processesCUVALCI OLKAN·Filed 2008·Granted Apr 3, 2012·14 cites·25 claims
- 0488US8618446B2Substrate support with substrate heater and symmetric RF returnCHANG YU·Filed 2011·Granted Dec 31, 2013·12 cites·22 claims
- 0585US8920564B2Methods and apparatus for thermal based substrate processing with variable temperature capabilityTZU GWO-CHUAN·Filed 2011·Granted Dec 30, 2014·4 cites·12 claims
- 0680US9837250B2Hot wall reactor with cooled vacuum containmentAPPLIED MATERIALS INC·Filed 2014·Granted Dec 5, 2017·4 cites·19 claims
- 0776US9543186B2Substrate support with controlled sealing gapAPPLIED MATERIALS INC·Filed 2013·Granted Jan 10, 2017·3 cites·19 claims
- 0875US10857655B2Substrate support plate with improved lift pin sealingAPPLIED MATERIALS INC·Filed 2013·Granted Dec 8, 2020·3 cites·19 claims
- 0975US9783889B2Apparatus for variable substrate temperature controlTZU GWO-CHUAN·Filed 2012·Granted Oct 10, 2017·1 cites·20 claims
- 1069US9916994B2Substrate support with multi-piece sealing surfaceAPPLIED MATERIALS INC·Filed 2013·Granted Mar 13, 2018·2 cites·17 claims
- 1155US2014174362A1Apparatus And Methods For Symmetrical Gas Distribution With High Purge EfficiencyKAO CHIEN-TEH·Filed 2013·Application pending·0 cites
- 1254US9202674B2Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elementsCUVALCI OLKAN·Filed 2008·Granted Dec 1, 2015·0 cites·9 claims
- 1346US9478447B2Substrate support with wire mesh plasma containmentAPPLIED MATERIALS INC·Filed 2012·Granted Oct 25, 2016·0 cites·16 claims
- 1445US2010304027A1Substrate processing system and methods thereofAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 1543US2014137961A1Modular chemical delivery systemAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1641US2014251214A1Heated substrate support with flatness controlAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1739US2005194374A1Heated ceramic substrate support with protective coatingAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →