Inventor · disambiguated record
Oleg Khodykin
Also filed as: KHODYKIN OLEG
21 granted patents·1 pending application·89 citations·filing 2013–2023
93Inventor score
Top patents by PatentIndex Score
22 records- 0197US10895541B2Systems and methods for combined x-ray reflectometry and photoelectron spectroscopyKLA TENCOR CORP·Filed 2018·Granted Jan 19, 2021·21 cites·20 claims
- 0295US10034362B2Plasma-based light sourceKLA TENCOR CORP·Filed 2015·Granted Jul 24, 2018·11 cites·45 claims
- 0394US11333621B2Methods and systems for semiconductor metrology based on polychromatic soft X-Ray diffractionKLA TENCOR CORP·Filed 2018·Granted May 17, 2022·10 cites·27 claims
- 0493US10959318B2X-ray metrology system with broadband laser produced plasma illuminatorKLA TENCOR CORP·Filed 2018·Granted Mar 23, 2021·6 cites·20 claims
- 0592US9544984B2System and method for generation of extreme ultraviolet lightKLA TENCOR CORP·Filed 2014·Granted Jan 10, 2017·10 cites·25 claims
- 0690US10021773B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA TENCOR CORP·Filed 2016·Granted Jul 10, 2018·4 cites·10 claims
- 0787US10806016B2High power broadband illumination sourceKLA TENCOR CORP·Filed 2018·Granted Oct 13, 2020·3 cites·44 claims
- 0885US9989758B2Debris protection system for reflective optic utilizing gas flowKLA TENCOR CORP·Filed 2014·Granted Jun 5, 2018·6 cites·54 claims
- 0982US9295147B2EUV light source using cryogenic droplet targets in mask inspectionKLA TENCOR CORP·Filed 2014·Granted Mar 22, 2016·5 cites·29 claims
- 1081US9918375B2Plasma based light source having a target material coated on a cylindrically-symmetric elementKLA TENCOR CORP·Filed 2016·Granted Mar 13, 2018·3 cites·25 claims
- 1181US9420678B2System and method for producing an exclusionary buffer gas flow in an EUV light sourceKLA TENCOR CORP·Filed 2014·Granted Aug 16, 2016·5 cites·18 claims
- 1278US11317500B2Bright and clean x-ray source for x-ray based metrologyKLA—TENCOR CORP·Filed 2018·Granted Apr 26, 2022·1 cites·19 claims
- 1378US10101664B2Apparatus and methods for optics protection from debris in plasma-based light sourceKLA TENCOR CORP·Filed 2015·Granted Oct 16, 2018·2 cites·20 claims
- 1469US11887835B2Laser-sustained plasma lamps with graded concentration of hydroxyl radicalKLA CORP·Filed 2022·Granted Jan 30, 2024·0 cites·18 claims
- 1569US9151881B2Phase grating for mask inspection systemKLA TENCOR CORP·Filed 2013·Granted Oct 6, 2015·1 cites·37 claims
- 1668US10880979B2Droplet generation for a laser produced plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Dec 29, 2020·1 cites·14 claims
- 1767US11536674B2Systems and methods for combined reflectometry and photoelectron spectroscopyKLA CORP·Filed 2020·Granted Dec 27, 2022·0 cites·21 claims
- 1867US11419202B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA CORP·Filed 2021·Granted Aug 16, 2022·0 cites·18 claims
- 1967US11343899B2Droplet generation for a laser produced plasma light sourceKLA CORP·Filed 2020·Granted May 24, 2022·0 cites·19 claims
- 2059US10893599B2Laser produced plasma light source having a target material coated on a cylindrically-symmetric elementKLA TENCOR CORP·Filed 2018·Granted Jan 12, 2021·0 cites·9 claims
- 2158US2024105440A1Pulse-assisted laser-sustained plasma in flowing high-pressure liquidsKLA CORP·Filed 2023·Application pending·0 cites
- 2237US11035804B2System and method for x-ray imaging and classification of volume defectsKLA TENCOR CORP·Filed 2017·Granted Jun 15, 2021·0 cites·51 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →