Inventor · disambiguated record
Olli Kilpela
Also filed as: KILPELA OLLI · KILPELA OLLI V · KILPELAE OLLI V
2 granted patents·2 pending applications·773 citations·filing 2002–2005
74Inventor score
Top patents by PatentIndex Score
4 records- 0198US6820570B2Atomic layer deposition reactorASM INT·Filed 2002·Granted Nov 23, 2004·647 cites·13 claims
- 0296US7476618B2Selective formation of metal layers in an integrated circuitASM JAPAN·Filed 2005·Granted Jan 13, 2009·126 cites·45 claims
- 0350US2005092249A1Atomic layer deposition reactorFiled 2004·Application pending·0 cites
- 0446US2005221004A1Vapor reactant source system with choked-flow elementsKILPELA OLLI V·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Olli Kilpela files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →