Inventor · disambiguated record
Ole Krogh
Also filed as: KROGH OLE · KROGH OLE D
6 granted patents·1 pending application·418 citations·filing 1988–2007
86Inventor score
Top patents by PatentIndex Score
7 records- 0194US5451259AECR plasma source for remote processingFiled 1994·Granted Sep 19, 1995·262 cites·8 claims
- 0289US5453125AECR plasma source for gas abatementFiled 1994·Granted Sep 26, 1995·91 cites·11 claims
- 0381US4949670AMethod and apparatus for low pressure plasmaTEGAL CORP·Filed 1988·Granted Aug 21, 1990·30 cites·3 claims
- 0472US7035696B1Method and apparatus for poly gate CD controlAHSOON TECHNOLOGIES INC·Filed 2002·Granted Apr 25, 2006·24 cites·33 claims
- 0565US6821350B2Cleaning process residues on a process chamber componentAPPLIED MATERIALS INC·Filed 2002·Granted Nov 23, 2004·8 cites·12 claims
- 0643US2008190446A1Control of dry clean process in wafer processingRANADE RAJIV M·Filed 2007·Application pending·0 cites
- 0737US4960610AMethod of treating semiconductor wafers in a magnetically confined plasma at low pressure by monitoring peak to peak voltage of the plasmaTEGAL CORP·Filed 1989·Granted Oct 2, 1990·3 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →