Inventor · disambiguated record
Olivier Rigoutat
Also filed as: RIGOUTAT OLIVIER
2 granted patents·2 pending applications·11 citations·filing 2008–2013
57Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0182US8349202B2Methods for controlling bevel edge etching in a plasma chamberLAM RES CORP·Filed 2011·Granted Jan 8, 2013·5 cites·12 claims
- 0278US8083890B2Gas modulation to control edge exclusion in a bevel edge etching plasma chamberFANG TONG·Filed 2008·Granted Dec 27, 2011·6 cites·17 claims
- 0352US2009170334A1Copper Discoloration Prevention Following Bevel Etch ProcessFANG TONG·Filed 2008·Application pending·0 cites
- 0450US2014051255A1Copper discoloration prevention following bevel etch processLAM RES CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →