Inventor · disambiguated record
Oleg Shulepov
Also filed as: SHULEPOV OLEG
2 granted patents·1 pending application·12 citations·filing 2013–2024
56Inventor score
Top patents by PatentIndex Score
3 records- 0191US10203247B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·10 cites·21 claims
- 0269US9512985B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2013·Granted Dec 6, 2016·2 cites·50 claims
- 0359US2025146893A1Transistor channel stress and mobility metrology using multipass spectroscopic ellipsometry and raman joint measurementKLA CORP·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →