Inventor · disambiguated record
Paul Arleo
Also filed as: ARLEO PAUL
5 granted patents·169 citations·filing 1991–2011
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0186US5176790AProcess for forming a via in an integrated circuit structure by etching through an insulation layer while inhibiting sputtering of underlying metalAPPLIED MATERIALS INC·Filed 1991·Granted Jan 5, 1993·108 cites·49 claims
- 0266US9134186B2Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpiecesSUN MEI·Filed 2011·Granted Sep 15, 2015·2 cites·52 claims
- 0365US5880037AOxide etch process using a mixture of a fluorine-substituted hydrocarbon and acetylene that provides high selectivity to nitride and is suitable for use on surfaces of uneven topographyAPPLIED MATERIALS INC·Filed 1997·Granted Mar 9, 1999·34 cites·9 claims
- 0448US6184150B1Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topographyAPPLIED MATERIALS INC·Filed 1997·Granted Feb 6, 2001·14 cites·13 claims
- 0544US6373679B1Electrostatic or mechanical chuck assembly conferring improved temperature uniformity onto workpieces held thereby, workpiece processing technology and/or apparatus containing the same, and method(s) for holding and/or processing a workpiece with the sameCYPRESS SEMICONDUCTOR CORP·Filed 1999·Granted Apr 16, 2002·11 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →