Inventor · disambiguated record
Patrick Breiling
Also filed as: BREILING PATRICK · BREILING PATRICK G · BREILING PATRICK GIRARD
22 granted patents·7 pending applications·577 citations·filing 2003–2024
95Inventor score
Top patents by PatentIndex Score
29 records- 0198US9399228B2Method and apparatus for purging and plasma suppression in a process chamberNOVELLUS SYSTEMS INC·Filed 2013·Granted Jul 26, 2016·428 cites·8 claims
- 0297US11608559B2Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film depositionLAM RES CORP·Filed 2021·Granted Mar 21, 2023·6 cites·20 claims
- 0397US9758868B1Plasma suppression behind a showerhead through the use of increased pressureLAM RES CORP·Filed 2016·Granted Sep 12, 2017·24 cites·13 claims
- 0497US7854828B2Method and apparatus for electroplating including remotely positioned second cathodeNOVELLUS SYSTEMS INC·Filed 2006·Granted Dec 21, 2010·50 cites·20 claims
- 0596US10655224B2Conical wafer centering and holding device for semiconductor processingLAM RES CORP·Filed 2016·Granted May 19, 2020·8 cites·20 claims
- 0694US11101164B2Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film depositionLAM RES CORP·Filed 2020·Granted Aug 24, 2021·3 cites·24 claims
- 0794US8741394B2In-situ deposition of film stacksHAVERKAMP JASON·Filed 2010·Granted Jun 3, 2014·25 cites·12 claims
- 0893US12000047B2Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film depositionLAM RES CORP·Filed 2023·Granted Jun 4, 2024·1 cites·20 claims
- 0993US10604841B2Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film depositionLAM RES CORP·Filed 2016·Granted Mar 31, 2020·7 cites·24 claims
- 1092US11837443B2Showerhead faceplate having flow apertures configured for hollow cathode discharge suppressionLAM RES CORP·Filed 2022·Granted Dec 5, 2023·1 cites·18 claims
- 1188US10984987B2Showerhead faceplate having flow apertures configured for hollow cathode discharge suppressionLAM RES CORP·Filed 2018·Granted Apr 20, 2021·4 cites·20 claims
- 1288US10214816B2PECVD apparatus for in-situ deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2014·Granted Feb 26, 2019·6 cites·9 claims
- 1387US12331402B2Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film depositionLAM RES CORP·Filed 2024·Granted Jun 17, 2025·0 cites·20 claims
- 1485US9028924B2In-situ deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2012·Granted May 12, 2015·7 cites·14 claims
- 1583US12385138B2Plasma-enhanced deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2023·Granted Aug 12, 2025·0 cites·11 claims
- 1682US2024112890A1Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge SuppressionLAM RES CORP·Filed 2023·Application pending·0 cites
- 1779US10622243B2Planar substrate edge contact with open volume equalization pathways and side containmentLAM RES CORP·Filed 2017·Granted Apr 14, 2020·2 cites·19 claims
- 1876US2025062150A1Electrostatic chuck with seal surfaceLAM RES CORP·Filed 2024·Application pending·0 cites
- 1973US11515124B2Showerhead faceplate having flow apertures configured for hollow cathode discharge suppressionLAM RES CORP·Filed 2021·Granted Nov 29, 2022·0 cites·21 claims
- 2070US11232966B2Electrostatic chucking pedestal with substrate backside purging and thermal sinkingLAM RES CORP·Filed 2018·Granted Jan 25, 2022·1 cites·19 claims
- 2163US11443975B2Planar substrate edge contact with open volume equalization pathways and side containmentLAM RES CORP·Filed 2020·Granted Sep 13, 2022·0 cites·24 claims
- 2256US12142509B2Electrostatic chuck with seal surfaceLAM RES CORP·Filed 2019·Granted Nov 12, 2024·0 cites·33 claims
- 2356US2023332291A1Remote plasma architecture for true radical processingLAM RES CORP·Filed 2021·Application pending·0 cites
- 2454US2014235069A1Multi-plenum showerhead with temperature controlNOVELLUS SYSTEMS INC·Filed 2013·Application pending·0 cites
- 2553US2025054736A1A wafer chuck assembly with thermal insulation for rf connectionsLAM RES CORP·Filed 2023·Application pending·0 cites
- 2651US2025038034A1Method and apparatus for radio frequency grid design in an esc to reduce film asymmetryLAM RES CORP·Filed 2023·Application pending·0 cites
- 2750US7146994B2Active rinse shield for electrofill chemical bath and method of useNOVELLUS SYSTEMS INC·Filed 2003·Granted Dec 12, 2006·2 cites·19 claims
- 2841US7413616B2Active rinse shield for electrofill chemical bath and method of useNOVELLUS SYSTEMS INC·Filed 2006·Granted Aug 19, 2008·2 cites·8 claims
- 2938US2018334746A1Wafer Edge Contact Hardware and Methods to Eliminate Deposition at Wafer Backside Edge and NotchLAM RES CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →