Inventor · disambiguated record
Palash P. Das
Also filed as: DAS PALASH · DAS PALASH P · DAS PALASH PARIJAT · DERUYTER ANTHONY J
71 granted patents·2 pending applications·5,427 citations·filing 1992–2022
99Inventor score
Top patents by PatentIndex Score
73 records- 0199US6567450B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted May 20, 2003·265 cites·52 claims
- 0299US6005879APulse energy control for excimer laserCYMER INC·Filed 1998·Granted Dec 21, 1999·231 cites·13 claims
- 0398US6625191B2Very narrow band, two chamber, high rep rate gas discharge laser systemCYMER INC·Filed 2001·Granted Sep 23, 2003·236 cites·78 claims
- 0498US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 0598US6018537AReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 1999·Granted Jan 25, 2000·280 cites·37 claims
- 0698US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 0798US5729562APulse power generating circuit with energy recoveryCYMER INC·Filed 1996·Granted Mar 17, 1998·241 cites·64 claims
- 0897US8362391B2Laser thin film poly-silicon annealing optical systemTCZ LLC·Filed 2010·Granted Jan 29, 2013·55 cites·20 claims
- 0997US6721340B1Bandwidth control technique for a laserCYMER INC·Filed 2000·Granted Apr 13, 2004·114 cites·4 claims
- 1097US6671294B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Dec 30, 2003·114 cites·11 claims
- 1197US6493374B1Smart laser with fast deformable gratingCYMER INC·Filed 2000·Granted Dec 10, 2002·90 cites·22 claims
- 1297US6240117B1Fluorine control system with fluorine monitorCYMER INC·Filed 1998·Granted May 29, 2001·205 cites·39 claims
- 1397US6192064B1Narrow band laser with fine wavelength controlCYMER INC·Filed 1999·Granted Feb 20, 2001·258 cites·19 claims
- 1496US6693939B2Laser lithography light source with beam deliveryCYMER INC·Filed 2002·Granted Feb 17, 2004·115 cites·2 claims
- 1596US5982800ANarrow band excimer laserCYMER INC·Filed 1997·Granted Nov 9, 1999·122 cites·9 claims
- 1696US5835520AVery narrow band KrF laserCYMER INC·Filed 1997·Granted Nov 10, 1998·140 cites·4 claims
- 1795US7415056B2Confocal pulse stretcherCYMER INC·Filed 2006·Granted Aug 19, 2008·26 cites·27 claims
- 1895US6529531B1Fast wavelength correction technique for a laserCYMER INC·Filed 2000·Granted Mar 4, 2003·86 cites·12 claims
- 1995US6028880AAutomatic fluorine control systemCYMER INC·Filed 1998·Granted Feb 22, 2000·227 cites·19 claims
- 2095US5978391AWavelength reference for excimer laserCYMER INC·Filed 1997·Granted Nov 2, 1999·123 cites·15 claims
- 2195US5586134AExcimer laserCYMER LASER TECH·Filed 1994·Granted Dec 17, 1996·94 cites·18 claims
- 2294US7884303B2Laser thin film poly-silicon annealing optical systemTCZ LLC·Filed 2005·Granted Feb 8, 2011·27 cites·16 claims
- 2393US7567607B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2006·Granted Jul 28, 2009·14 cites·3 claims
- 2493US7009140B2Laser thin film poly-silicon annealing optical systemCYMER INC·Filed 2004·Granted Mar 7, 2006·57 cites·8 claims
- 2593US6704340B2Lithography laser system with in-place alignment toolCYMER INC·Filed 2002·Granted Mar 9, 2004·53 cites·13 claims
- 2693US6704339B2Lithography laser with beam delivery and beam pointing controlCYMER INC·Filed 2002·Granted Mar 9, 2004·50 cites·80 claims
- 2793US6392743B1Control technique for microlithography lasersCYMER INC·Filed 2000·Granted May 21, 2002·64 cites·7 claims
- 2893US6381257B1Very narrow band injection seeded F2 lithography laserCYMER INC·Filed 1999·Granted Apr 30, 2002·106 cites·14 claims
- 2993US6151349AAutomatic fluorine control systemCYMER INC·Filed 1999·Granted Nov 21, 2000·155 cites·16 claims
- 3093US6078599AWavelength shift correction technique for a laserCYMER INC·Filed 1997·Granted Jun 20, 2000·115 cites·18 claims
- 3193US6014398ANarrow band excimer laser with gas additiveCYMER INC·Filed 1998·Granted Jan 11, 2000·106 cites·13 claims
- 3293US5978409ALine narrowing apparatus with high transparency prism beam expanderCYMER INC·Filed 1998·Granted Nov 2, 1999·104 cites·14 claims
- 3393US5377215AExcimer laserCYMER LASER TECH·Filed 1992·Granted Dec 27, 1994·75 cites·97 claims
- 3492US6618421B2High repetition rate gas discharge laser with precise pulse timing controlCYMER INC·Filed 2001·Granted Sep 9, 2003·59 cites·10 claims
- 3592USRE38054EReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 2001·Granted Apr 1, 2003·42 cites·37 claims
- 3692US6370174B1Injection seeded F2 lithography laserCYMER INC·Filed 1999·Granted Apr 9, 2002·99 cites·23 claims
- 3790US7061959B2Laser thin film poly-silicon annealing systemTCZ GMBH·Filed 2004·Granted Jun 13, 2006·68 cites·7 claims
- 3890US6985508B2Very narrow band, two chamber, high reprate gas discharge laser systemCYMER INC·Filed 2003·Granted Jan 10, 2006·29 cites·23 claims
- 3990US6621846B1Electric discharge laser with active wavelength chirp correctionCYMER INC·Filed 2000·Granted Sep 16, 2003·41 cites·40 claims
- 4090US6067306ALaser-illuminated stepper or scanner with energy sensor feedbackCYMER INC·Filed 1998·Granted May 23, 2000·84 cites·19 claims
- 4187US5646954AMaintenance strategy control system and monitoring method for gas discharge lasersCYMER INC·Filed 1996·Granted Jul 8, 1997·86 cites·12 claims
- 4286US6317448B1Bandwidth estimating technique for narrow band laserCYMER INC·Filed 1999·Granted Nov 13, 2001·65 cites·8 claims
- 4384US8265109B2Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrateDAS PALASH P·Filed 2009·Granted Sep 11, 2012·9 cites·20 claims
- 4483US7167499B2Very high energy, high stability gas discharge laser surface treatment systemTCZ PTE LTD·Filed 2004·Granted Jan 23, 2007·38 cites·54 claims
- 4582US7061961B2Very narrow band, two chamber, high rep-rate gas discharge laser systemCYMER INC·Filed 2005·Granted Jun 13, 2006·5 cites·20 claims
- 4680US5848089AExcimer laser with magnetic bearings supporting fanCYMER INC·Filed 1997·Granted Dec 8, 1998·51 cites·12 claims
- 4777US12245350B2Optical isolation moduleASML NETHERLANDS BV·Filed 2022·Granted Mar 4, 2025·0 cites·16 claims
- 4877US7016388B2Laser lithography light source with beam deliveryCYMER INC·Filed 2003·Granted Mar 21, 2006·15 cites·28 claims
- 4976US5748656ALaser having improved beam quality and reduced operating costCYMER INC·Filed 1996·Granted May 5, 1998·37 cites·36 claims
- 5075US6021150ALaser having baffled enclosureCYMER INC·Filed 1998·Granted Feb 1, 2000·35 cites·12 claims
Showing the top 50 of 73 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →