Inventor · disambiguated record
Patrick Huet
Also filed as: HUET PATRICK · HUET PATRICK Y
13 granted patents·1 pending application·341 citations·filing 2003–2014
92Inventor score
Top patents by PatentIndex Score
14 records- 0192US7570797B1Methods and systems for generating an inspection process for an inspection systemKLA TENCOR TECH CORP·Filed 2005·Granted Aug 4, 2009·83 cites·20 claims
- 0292US7227628B1Wafer inspection systems and methods for analyzing inspection dataKLA TENCOR TECH CORP·Filed 2004·Granted Jun 5, 2007·58 cites·30 claims
- 0390US7417724B1Wafer inspection systems and methods for analyzing inspection dataKLA TENCOR TECH CORP·Filed 2007·Granted Aug 26, 2008·14 cites·32 claims
- 0490US6718526B1Spatial signature analysisKLA TENCOR CORP·Filed 2003·Granted Apr 6, 2004·100 cites·20 claims
- 0582US7394534B1Process excursion detectionKLA TENCOR CORP·Filed 2003·Granted Jul 1, 2008·15 cites·1 claims
- 0681US7142992B1Flexible hybrid defect classification for semiconductor manufacturingKLA TENCOR TECH CORP·Filed 2004·Granted Nov 28, 2006·28 cites·19 claims
- 0779US7006886B1Detection of spatially repeating signaturesKLA TENCOR TECH CORP·Filed 2004·Granted Feb 28, 2006·23 cites·8 claims
- 0877US8537349B2Monitoring of time-varying defect classification performanceHUET PATRICK·Filed 2010·Granted Sep 17, 2013·6 cites·17 claims
- 0974US8165837B1Multi-scale classification of defectsPARAMASIVAM SARAVANAN·Filed 2009·Granted Apr 24, 2012·10 cites·6 claims
- 1072US7646476B2Process excursion detectionKLA TENCOR CORP·Filed 2008·Granted Jan 12, 2010·2 cites·4 claims
- 1152US2010067781A1Process Excursion DetectionKLA TENCOR CORP·Filed 2009·Application pending·0 cites
- 1250US8289510B2Process excursion detectionHUET PATRICK Y·Filed 2011·Granted Oct 16, 2012·0 cites·5 claims
- 1348US9037280B2Computer-implemented methods for performing one or more defect-related functionsDISHNER MARK·Filed 2005·Granted May 19, 2015·2 cites·46 claims
- 1447US9489599B2Decision tree construction for automatic classification of defects on semiconductor wafersKLA TENCOR CORP·Filed 2014·Granted Nov 8, 2016·0 cites·33 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →