Inventor · disambiguated record
Peter A. Delmastro
Also filed as: DELMASTRO PETER A
7 granted patents·3 pending applications·8 citations·filing 2013–2017
77Inventor score
Top patents by PatentIndex Score
10 records- 0188US9632434B2Reticle cooling system in a lithographic apparatusASML HOLDING NV·Filed 2015·Granted Apr 25, 2017·3 cites·20 claims
- 0281US9632433B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2013·Granted Apr 25, 2017·2 cites·9 claims
- 0378US9766557B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted Sep 19, 2017·1 cites·13 claims
- 0477US9513568B2Lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Dec 6, 2016·2 cites·20 claims
- 0561US9977351B2Patterning device support, lithographic apparatus, and method of controlling patterning device temperatureASML HOLDING NV·Filed 2017·Granted May 22, 2018·0 cites·14 claims
- 0654US10788763B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 29, 2020·0 cites·20 claims
- 0754US2015212432A1Reticle Heater to Keep Reticle Heating UniformASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
- 0846US2015192856A1Heating and Cooling Systems in a Lithographic ApparatusASML NETHERLANDS BV·Filed 2015·Application pending·0 cites
- 0941US2015241797A1Reticle Cleaning by Means of Sticky SurfaceASML NETHERLANDS BV·Filed 2013·Application pending·0 cites
- 1035US9857694B2Estimating deformation of a patterning device and/or a change in its positionASML NETHERLANDS BV·Filed 2015·Granted Jan 2, 2018·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →