Inventor · disambiguated record
Peng-Yih Peng
Also filed as: PENG PENG-YIH
18 granted patents·4 pending applications·340 citations·filing 1997–2007
95Inventor score
Top patents by PatentIndex Score
22 records- 0191US6120366AChemical-mechanical polishing padUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 19, 2000·99 cites·10 claims
- 0284US6220930B1Wafer polishing headUNITED MICROELECTRONICS CORP·Filed 2000·Granted Apr 24, 2001·23 cites·9 claims
- 0381US5944593ARetainer ring for polishing head of chemical-mechanical polish machinesUNITED MICROELECTRONICS CORP·Filed 1997·Granted Aug 31, 1999·64 cites·6 claims
- 0475US6293850B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 25, 2001·28 cites·13 claims
- 0575US6183350B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Feb 6, 2001·28 cites·10 claims
- 0657US6106714AFiltering apparatus with stirrer in a CMP apparatusUNITED MICROELECTRONICS CORP·Filed 1998·Granted Aug 22, 2000·23 cites·6 claims
- 0756US6352244B2Auxiliary gasline-heating unit in chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 2001·Granted Mar 5, 2002·2 cites·2 claims
- 0856US6322057B1Auxiliary gasline-heating unit in chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 2000·Granted Nov 27, 2001·2 cites·1 claims
- 0956US5993647ACirculation system of slurryUNITED MICROELECTRONICS CORP·Filed 1998·Granted Nov 30, 1999·18 cites·10 claims
- 1046US2007298694A1Wafer polishing headUNITED MICROELECTRONICS CORP·Filed 2007·Application pending·0 cites
- 1143US6062963ARetainer ring design for polishing head of chemical-mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted May 16, 2000·10 cites·10 claims
- 1242US6241582B1Chemical mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1998·Granted Jun 5, 2001·6 cites·20 claims
- 1341US6206758B1Method for increasing working life of retaining ring in chemical-mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted Mar 27, 2001·9 cites·11 claims
- 1440US6119294ACleaning system with automatically controlled brush pressureUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 19, 2000·8 cites·24 claims
- 1538US2001000770A1Wafer polishing headUNITED MICROELECTRONICS CORP·Filed 2000·Application pending·0 cites
- 1637US6096162AChemical mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted Aug 1, 2000·7 cites·9 claims
- 1736US2007181420A1Wafer stage having an encapsulated central pedestal plateWANG MING-TUNG·Filed 2006·Application pending·0 cites
- 1835US6051139ADevice for filtering slurryUNITED MICROELECTRONICS CORP·Filed 1998·Granted Apr 18, 2000·6 cites·5 claims
- 1933US6280079B1Method of mixing slurriesUNITED MICROELECTRONICS CORP·Filed 1998·Granted Aug 28, 2001·5 cites·8 claims
- 2030US6234876B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted May 22, 2001·0 cites·8 claims
- 2129US6165255AChemical-liquid controlling apparatusUNITED MICROELECTRONICS CORP·Filed 1999·Granted Dec 26, 2000·2 cites·10 claims
- 2229US2007066187A1Chemical mechanical polishing device including a polishing pad and cleaning method thereof and method for planarizationYANG CHIH-CHIANG·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →