Inventor · disambiguated record
Peter Thaulad
Also filed as: THAULAD PETER · THAULAD PETER S
14 granted patents·3 pending applications·1,267 citations·filing 2006–2025
92Inventor score
Files withLAM RES CORP13BROAD OF TRUSTEES OF THE LELAN1LAM RES AG1NOVELLUS SYSTEMS INC1UNIV LELAND STANFORD JUNIOR1
Top patents by PatentIndex Score
17 records- 0195US7211979B2Torque-position transformer for task control of position controlled robotsBROAD OF TRUSTEES OF THE LELAN·Filed 2006·Granted May 1, 2007·1.2k cites·11 claims
- 0292US10651065B2Auto-calibration to a station of a process module that spins a waferLAM RES CORP·Filed 2018·Granted May 12, 2020·6 cites·23 claims
- 0392US7405531B2Torque-position transformer for task control of position controlled robotsUNIV LELAND STANFORD JUNIOR·Filed 2007·Granted Jul 29, 2008·42 cites·11 claims
- 0489US10796940B2Enhanced automatic wafer centering system and techniques for sameLAM RES CORP·Filed 2018·Granted Oct 6, 2020·5 cites·34 claims
- 0589US9831110B2Vision-based wafer notch position measurementLAM RES CORP·Filed 2015·Granted Nov 28, 2017·13 cites·20 claims
- 0684US12489006B2Auto-calibration to a station of a process module that spins a waferLAM RES CORP·Filed 2023·Granted Dec 2, 2025·0 cites·20 claims
- 0781US7811153B1High throughput servo load cup with integrated wet chemistry deliveryNOVELLUS SYSTEMS INC·Filed 2007·Granted Oct 12, 2010·11 cites·29 claims
- 0880US11581214B2Enhanced automatic wafer centering system and techniques for sameLAM RES CORP·Filed 2019·Granted Feb 14, 2023·2 cites·32 claims
- 0977US11742229B2Auto-calibration to a station of a process module that spins a waferLAM RES CORP·Filed 2021·Granted Aug 29, 2023·0 cites·20 claims
- 1076US9349629B2Touch auto-calibration of process modulesLAM RES CORP·Filed 2014·Granted May 24, 2016·3 cites·20 claims
- 1172US2025293063A1Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health checkLAM RES CORP·Filed 2025·Application pending·0 cites
- 1271US11239100B2Auto-calibration to a station of a process module that spins a waferLAM RES CORP·Filed 2020·Granted Feb 1, 2022·0 cites·20 claims
- 1370US10509052B2Smart vibration wafer with optional integration with semiconductor processing toolLAM RES CORP·Filed 2017·Granted Dec 17, 2019·2 cites·20 claims
- 1456US12341040B2Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health checkLAM RES CORP·Filed 2020·Granted Jun 24, 2025·0 cites·19 claims
- 1554US2025364304A1System for processing wafer-shaped articlesLAM RES AG·Filed 2023·Application pending·0 cites
- 1653US2025232997A1Adaptive positioning systems and routines using an autocalibration wafer and a calibration wafer with cutoutsLAM RES CORP·Filed 2022·Application pending·0 cites
- 1748US12168301B2Fixture for automatic calibration of substrate transfer robotLAM RES CORP·Filed 2020·Granted Dec 17, 2024·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →