Inventor · disambiguated record
Phillip Atkins
Also filed as: ATKINS PHILLIP · ATKINS PHILLIP R
3 granted patents·2 pending applications·9 citations·filing 2018–2025
59Inventor score
Top patents by PatentIndex Score
5 records- 0188US11156548B2Measurement methodology of advanced nanostructuresKLA TENCOR CORP·Filed 2018·Granted Oct 26, 2021·6 cites·20 claims
- 0284US10732515B2Detection and measurement of dimensions of asymmetric structuresKLA TENCOR CORP·Filed 2018·Granted Aug 4, 2020·3 cites·20 claims
- 0361US2025237496A1Methods And Systems For Reflectometry Based Measurements Of Deep, Large Pitch Semiconductor StructuresKLA CORP·Filed 2024·Application pending·0 cites
- 0458US2025383299A1Physics augmented regression algorithm for critical dimensions in large pitch targetsKLA CORP·Filed 2025·Application pending·0 cites
- 0544US11422095B2Scatterometry modeling in the presence of undesired diffraction ordersKLA TENCOR CORP·Filed 2019·Granted Aug 23, 2022·0 cites·31 claims
Join the waitlist — get patent alerts
Get an alert when Phillip Atkins files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →