Inventor · disambiguated record
Po-Feng Tsai
Also filed as: TSAI PO-FENG
21 granted patents·2 pending applications·118 citations·filing 2004–2024
94Inventor score
Files withTSAI PO-FENG8TAIWAN SEMICONDUCTOR MFG CO LTD7TAIWAN SEMICONDUCTOR MFG2TSEN ANDY2CHEN JUI-LONG1
Top patents by PatentIndex Score
23 records- 0193US8437870B2System and method for implementing a virtual metrology advanced process control platformTSAI PO-FENG·Filed 2009·Granted May 7, 2013·31 cites·17 claims
- 0292US8108060B2System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architectureTSEN ANDY·Filed 2009·Granted Jan 31, 2012·25 cites·19 claims
- 0385US12050153B2Method for monitoring transport vehicle and maintenance thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 30, 2024·2 cites·20 claims
- 0485US11195720B2Method for ion implantation that adjusts a target's tilt angle based on a distribution of ejected ions from a targetTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 7, 2021·2 cites·20 claims
- 0584US8606387B2Adaptive and automatic determination of system parametersTSAI PO-FENG·Filed 2011·Granted Dec 10, 2013·6 cites·20 claims
- 0684US8394719B2System and method for implementing multi-resolution advanced process controlTSEN ANDY·Filed 2011·Granted Mar 12, 2013·9 cites·20 claims
- 0784US8224475B2Method and apparatus for advanced process controlTSAI PO-FENG·Filed 2009·Granted Jul 17, 2012·10 cites·20 claims
- 0882US12051593B2Method for an ion implantation process employing an ion-collecting device that collects a distribution of ejected ions from a target to correct a tilt angle of the targetTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 30, 2024·0 cites·20 claims
- 0982US8396583B2Method and system for implementing virtual metrology in semiconductor fabricationTSAI PO-FENG·Filed 2010·Granted Mar 12, 2013·6 cites·20 claims
- 1082US2024347341A1Method for ion implantation that adjusts a target's tilt angle based on a distribution of ejected ions from a targetTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1179US9519285B2Systems and associated methods for tuning processing toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 13, 2016·4 cites·20 claims
- 1277US11615961B2Method for ion implantation that adjusts a targets tilt angle based on a distribution of ejected ions from a targetTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 28, 2023·0 cites·20 claims
- 1373US8406912B2System and method for data mining and feature tracking for fab-wide prediction and controlCHEN JUI-LONG·Filed 2010·Granted Mar 26, 2013·3 cites·17 claims
- 1470US9870896B2System and method for controlling ion implanterTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 16, 2018·2 cites·20 claims
- 1569US9349660B2Integrated circuit manufacturing tool condition monitoring system and methodTSAI PO-FENG·Filed 2011·Granted May 24, 2016·2 cites·20 claims
- 1668US9727049B2Qualitative fault detection and classification system for tool condition monitoring and associated methodsHO CHIA-TONG·Filed 2012·Granted Aug 8, 2017·3 cites·19 claims
- 1766US9141097B2Adaptive and automatic determination of system parametersTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Sep 22, 2015·1 cites·20 claims
- 1866US7951615B2System and method for implementing multi-resolution advanced process controlTAIWAN SEMICONDUCTOR MFG·Filed 2009·Granted May 31, 2011·2 cites·20 claims
- 1962US8549012B2Processing exception handlingTSAI PO-FENG·Filed 2010·Granted Oct 1, 2013·1 cites·18 claims
- 2059US7187990B2Process controlling method with merged two-control loopsUNIV TSINGHUA·Filed 2004·Granted Mar 6, 2007·9 cites·3 claims
- 2142US10047439B2Method and system for tool condition monitoring based on a simulated inline measurementTSAI PO FENG·Filed 2011·Granted Aug 14, 2018·0 cites·20 claims
- 2242US2013051023A1Light Bar and Manufacturing Method ThereofHUANG TZU-CHIEN·Filed 2012·Application pending·0 cites
- 2339US9026239B2APC model extension using existing APC modelsTSAI PO-FENG·Filed 2010·Granted May 5, 2015·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →