Inventor · disambiguated record
Prasanna Dighe
Also filed as: DIGHE PRASANNA
7 granted patents·85 citations·filing 2008–2021
82Inventor score
Top patents by PatentIndex Score
7 records- 0196US9087176B1Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process controlKLA TENCOR CORP·Filed 2014·Granted Jul 21, 2015·57 cites·20 claims
- 0291US11164768B2Process-induced displacement characterization during semiconductor productionKLA TENCOR CORP·Filed 2018·Granted Nov 2, 2021·6 cites·34 claims
- 0388US8269960B2Computer-implemented methods for inspecting and/or classifying a waferREICH JUERGEN·Filed 2008·Granted Sep 18, 2012·19 cites·38 claims
- 0487US11682570B2Process-induced displacement characterization during semiconductor productionKLA CORP·Filed 2021·Granted Jun 20, 2023·1 cites·27 claims
- 0573US10545412B2Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process controlKLA TENCOR CORP·Filed 2015·Granted Jan 28, 2020·2 cites·18 claims
- 0653US11049720B2Removable opaque coating for accurate optical topography measurements on top surfaces of transparent filmsKLA CORP·Filed 2019·Granted Jun 29, 2021·0 cites·18 claims
- 0744US11441893B2Multi-spot analysis system with multiple optical probesKLA TENCOR CORP·Filed 2018·Granted Sep 13, 2022·0 cites·47 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →