Inventor · disambiguated record
Qi Xie
Also filed as: XIE QI
91 granted patents·30 pending applications·4,834 citations·filing 2010–2025
99Inventor score
Files withASM IP HOLDING BV109HUAWEI TECH CO LTD5UNIV HANGZHOU NORMAL3ASM INT1GRG BANKING EQUIPMENT CO LTD1
Top patents by PatentIndex Score
121 records- 0198US10847361B2Selective deposition of aluminum and nitrogen containing materialASM IP HOLDING BV·Filed 2020·Granted Nov 24, 2020·16 cites·20 claims
- 0298US10480064B2Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2018·Granted Nov 19, 2019·47 cites·20 claims
- 0398US10361201B2Semiconductor structure and device formed using selective epitaxial processASM IP HOLDING BV·Filed 2016·Granted Jul 23, 2019·412 cites·9 claims
- 0498US10041166B2Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2017·Granted Aug 7, 2018·57 cites·20 claims
- 0598US10032628B2Source/drain performance through conformal solid state dopingASM IP HOLDING BV·Filed 2016·Granted Jul 24, 2018·463 cites·16 claims
- 0698US9905492B2System and method for gas-phase passivation of a semiconductor surfaceASM IP HOLDING BV·Filed 2017·Granted Feb 27, 2018·361 cites·10 claims
- 0798US9803277B1Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2016·Granted Oct 31, 2017·87 cites·19 claims
- 0898US9558931B2System and method for gas-phase sulfur passivation of a semiconductor surfaceASM IP HOLDING BV·Filed 2013·Granted Jan 31, 2017·478 cites·14 claims
- 0998US9245742B2Sulfur-containing thin filmsASM IP HOLDING BV·Filed 2013·Granted Jan 26, 2016·476 cites·12 claims
- 1098US9240412B2Semiconductor structure and device and methods of forming same using selective epitaxial processASM IP HOLDING BV·Filed 2013·Granted Jan 19, 2016·503 cites·20 claims
- 1197US11581220B2Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structuresASM IP HOLDING BV·Filed 2021·Granted Feb 14, 2023·4 cites·20 claims
- 1297US11521851B2Method of forming structures including a vanadium or indium layerASM IP HOLDING BV·Filed 2021·Granted Dec 6, 2022·5 cites·15 claims
- 1397US10903113B2Selective deposition of aluminum and nitrogen containing materialASM IP HOLDING BV·Filed 2020·Granted Jan 26, 2021·16 cites·20 claims
- 1497US10410943B2Method for passivating a surface of a semiconductor and related systemsASM IP HOLDING BV·Filed 2017·Granted Sep 10, 2019·339 cites·19 claims
- 1597US10367080B2Method of forming a germanium oxynitride filmASM IP HOLDING BV·Filed 2016·Granted Jul 30, 2019·375 cites·20 claims
- 1697US9911676B2System and method for gas-phase passivation of a semiconductor surfaceASM IP HOLDING BV·Filed 2017·Granted Mar 6, 2018·464 cites·20 claims
- 1796US11295980B2Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structuresASM IP HOLDING BV·Filed 2018·Granted Apr 5, 2022·14 cites·17 claims
- 1896US11286558B2Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride filmASM IP HOLDING BV·Filed 2020·Granted Mar 29, 2022·9 cites·38 claims
- 1996US10793946B1Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2019·Granted Oct 6, 2020·17 cites·21 claims
- 2096US10643904B2Methods for forming a semiconductor device and related semiconductor device structuresASM IP HOLDING BV·Filed 2017·Granted May 5, 2020·19 cites·20 claims
- 2196US10566185B2Selective deposition of aluminum and nitrogen containing materialASM IP HOLDING BV·Filed 2015·Granted Feb 18, 2020·22 cites·26 claims
- 2296US10553482B2Selective deposition of aluminum and nitrogen containing materialASM IP HOLDING BV·Filed 2018·Granted Feb 4, 2020·18 cites·20 claims
- 2396US10121699B2Selective deposition of aluminum and nitrogen containing materialASM IP HOLDING BV·Filed 2017·Granted Nov 6, 2018·23 cites·21 claims
- 2496US9552979B2Cyclic aluminum nitride deposition in a batch reactorASM IP HOLDING BV·Filed 2013·Granted Jan 24, 2017·43 cites·25 claims
- 2596US9136180B2Process for depositing electrode with high effective work functionMACHKAOUTSAN VLADIMIR·Filed 2012·Granted Sep 15, 2015·466 cites·38 claims
- 2695US12237171B1Method of forming vanadium nitride layer and structure including the vanadium nitride layerASM IP HOLDING BV·Filed 2023·Granted Feb 25, 2025·2 cites·10 claims
- 2794US9553148B2Method of making a wire-based semiconductor deviceASM IP HOLDING BV·Filed 2015·Granted Jan 24, 2017·10 cites·13 claims
- 2894US9461134B1Method for forming source/drain contact structure with chalcogen passivationASM IP HOLDING BV·Filed 2015·Granted Oct 4, 2016·12 cites·23 claims
- 2993US11873557B2Method of depositing vanadium metalASM IP HOLDING BV·Filed 2021·Granted Jan 16, 2024·2 cites·16 claims
- 3093US11798999B2Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structuresASM IP HOLDING BV·Filed 2022·Granted Oct 24, 2023·1 cites·20 claims
- 3191US12266695B2Structures with doped semiconductor layers and methods and systems for forming sameASM IP HOLDING BV·Filed 2023·Granted Apr 1, 2025·1 cites·19 claims
- 3291US11885013B2Method of forming vanadium nitride layer and structure including the vanadium nitride layerASM IP HOLDING BV·Filed 2020·Granted Jan 30, 2024·2 cites·24 claims
- 3390US12159788B2Method of forming structures for threshold voltage controlASM IP HOLDING BV·Filed 2021·Granted Dec 3, 2024·2 cites·18 claims
- 3490US12119228B2Deposition methodASM IP HOLDING BV·Filed 2022·Granted Oct 15, 2024·1 cites·20 claims
- 3590US9711396B2Method for forming metal chalcogenide thin films on a semiconductor deviceASM IP HOLDING BV·Filed 2015·Granted Jul 18, 2017·7 cites·20 claims
- 3689US11495459B2Methods for selective deposition using a sacrificial capping layerASM IP HOLDING BV·Filed 2020·Granted Nov 8, 2022·2 cites·9 claims
- 3788US12406881B2Methods and systems for filling a gapASM IP HOLDING BV·Filed 2022·Granted Sep 2, 2025·1 cites·17 claims
- 3888US11898243B2Method of forming vanadium nitride-containing layerASM IP HOLDING BV·Filed 2020·Granted Feb 13, 2024·2 cites·14 claims
- 3987US9478419B2Sulfur-containing thin filmsASM IP HOLDING BV·Filed 2013·Granted Oct 25, 2016·7 cites·19 claims
- 4086US9741815B2Metal selenide and metal telluride thin films for semiconductor device applicationsASM IP HOLDING BV·Filed 2015·Granted Aug 22, 2017·5 cites·23 claims
- 4186US9520562B2Method of making a resistive random access memoryASM IP HOLDING BV·Filed 2014·Granted Dec 13, 2016·7 cites·56 claims
- 4286US2025092513A1Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride filmASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4385US11393690B2Deposition methodASM IP HOLDING BV·Filed 2019·Granted Jul 19, 2022·3 cites·25 claims
- 4485US9012278B2Method of making a wire-based semiconductor deviceASM IP HOLDING BV·Filed 2013·Granted Apr 21, 2015·5 cites·27 claims
- 4584US12215416B2Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride filmASM IP HOLDING BV·Filed 2023·Granted Feb 4, 2025·0 cites·20 claims
- 4684US12094936B2Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structuresASM IP HOLDING BV·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 4784US11781243B2Method for depositing low temperature phosphorous-doped siliconASM IP HOLDING BV·Filed 2021·Granted Oct 10, 2023·1 cites·19 claims
- 4884US10607895B2Method for forming a semiconductor device structure comprising a gate fill metalASM IP HOLDING BV·Filed 2017·Granted Mar 31, 2020·3 cites·65 claims
- 4984US10199213B2Sulfur-containing thin filmsASM IP HOLDING BV·Filed 2017·Granted Feb 5, 2019·2 cites·20 claims
- 5084US10194273B2Positioning information processing method and apparatusHUAWEI TECH CO LTD·Filed 2016·Granted Jan 29, 2019·4 cites·14 claims
Showing the top 50 of 121 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →