Inventor · disambiguated record
Ramesh Gopalan
Also filed as: GOPALAN RAMESH
14 granted patents·9 pending applications·18 citations·filing 2002–2023
86Inventor score
Top patents by PatentIndex Score
23 records- 0189US11114326B2Substrate chucking and dechucking methodsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·6 cites·12 claims
- 0282US10685819B2Measuring concentrations of radicals in semiconductor processingAPPLIED MATERIALS INC·Filed 2018·Granted Jun 16, 2020·4 cites·20 claims
- 0373US11373890B2Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processingAPPLIED MATERIALS INC·Filed 2019·Granted Jun 28, 2022·1 cites·8 claims
- 0469US12033875B2Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processingAPPLIED MATERIALS INC·Filed 2022·Granted Jul 9, 2024·0 cites·6 claims
- 0569US11047035B2Protective yttria coating for semiconductor equipment partsAPPLIED MATERIALS INC·Filed 2019·Granted Jun 29, 2021·1 cites·19 claims
- 0661US10656100B2Surface acoustic wave sensors in semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2018·Granted May 19, 2020·0 cites·20 claims
- 0758US11355325B2Methods and systems for monitoring input power for process control in semiconductor process systemsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 7, 2022·0 cites·17 claims
- 0857US7413988B1Method and apparatus for detecting planarization of metal films prior to clearingLAM RES CORP·Filed 2003·Granted Aug 19, 2008·6 cites·16 claims
- 0955US11521839B2Inline measurement of process gas dissociation using infrared absorptionAPPLIED MATERIALS INC·Filed 2019·Granted Dec 6, 2022·0 cites·19 claims
- 1054US2025144557A1Carbon capture composition and systemGOPALAN RAMESH·Filed 2023·Application pending·0 cites
- 1152US7690966B1Method and apparatus for detecting planarization of metal films prior to clearingLAM RES CORP·Filed 2008·Granted Apr 6, 2010·0 cites·5 claims
- 1252US2020196937A1Smart Cosmetic ApplicatorGOPALAN RAMESH·Filed 2019·Application pending·0 cites
- 1350US10094788B2Surface acoustic wave sensors in semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2016·Granted Oct 9, 2018·0 cites·20 claims
- 1446US10513008B2Chemical mechanical polishing smart ringAPPLIED MATERIALS INC·Filed 2017·Granted Dec 24, 2019·0 cites·18 claims
- 1545US10415251B1Skylight with compound parabolic diffusersGOPALAN RAMESH·Filed 2019·Granted Sep 17, 2019·0 cites·8 claims
- 1644US2021375701A1Methods and systems for processing a substrateAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1744US2021138279A1Anti-virus filter for facemasks and respiratorsGOPALAN RAMESH·Filed 2021·Application pending·0 cites
- 1843US2021045286A1Self-Regulating Smart Irrigation SystemGOPALAN RAMESH·Filed 2020·Application pending·0 cites
- 1943US2007198516A1Method of and system for organizing unstructured information utilizing parameterized templates and a technology presentation layerGANAPATHY PALAMADAI R·Filed 2007·Application pending·0 cites
- 2038US2018209151A1SkylightGOPALAN RAMESH·Filed 2017·Application pending·0 cites
- 2138US2017056935A1Method for removing aluminum fluoride contamination from semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 2234US7040952B1Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization processLAM RES CORP·Filed 2002·Granted May 9, 2006·0 cites·7 claims
- 2334US2016155657A1Surface profile modifications for extended life of consumable parts in semiconductor processing equipmentAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →