Inventor · disambiguated record
Rason Zuo
Also filed as: ZUO RASON
8 granted patents·2 pending applications·0 citations·filing 2016–2021
70Inventor score
Files withADVANCED MICRO FABRICATION EQUIPMENT INC CHINA8ADVANCED MICRO FABRICATION EQUIPMENT INC SHANGHAI2
Top patents by PatentIndex Score
10 records- 0161US12309891B2Control method for multi-zone active-matrix temperature control in plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted May 20, 2025·0 cites·16 claims
- 0255US11676803B2Liner assembly for vacuum treatment apparatus, and vacuum treatment apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Jun 13, 2023·0 cites·24 claims
- 0353US11371141B2Plasma process apparatus with low particle contamination and method of operating the sameADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2018·Granted Jun 28, 2022·0 cites·11 claims
- 0450US12094693B2Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ringADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2021·Granted Sep 17, 2024·0 cites·20 claims
- 0545US11621149B2Corrosion-resistant gas delivery assembly, and plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted Apr 4, 2023·0 cites·15 claims
- 0645US2017186592A1Multi-zone active-matrix temperature control system and temperature control method, and electrostatic chuck and plasma processing apparatus apply thereofADVANCED MICRO-FABRICATION EQUIPMENT INC SHANGHAI·Filed 2016·Application pending·0 cites
- 0744US12341037B2Temperature control apparatus for semiconductor processing equipment, and temperature control method for the sameADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2019·Granted Jun 24, 2025·0 cites·11 claims
- 0841US11348763B2Corrosion-resistant structure for a gas delivery system in a plasma processing apparatusADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2020·Granted May 31, 2022·0 cites·9 claims
- 0935US2017186585A1Electrode structure for icp etcherADVANCED MICRO-FABRICATION EQUIPMENT INC SHANGHAI·Filed 2016·Application pending·0 cites
- 1033US11387084B2Uniform pumping dual-station vacuum processorADVANCED MICRO FABRICATION EQUIPMENT INC CHINA·Filed 2017·Granted Jul 12, 2022·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →