Inventor · disambiguated record
Reiner Hinterschuster
Also filed as: HINTERSCHUSTER REINER
4 granted patents·3 pending applications·95 citations·filing 1995–2016
76Inventor score
Top patents by PatentIndex Score
7 records- 0188US5909995ATransport device for workpieces in a vacuum systemBALZERS HOCHVAKUUM·Filed 1997·Granted Jun 8, 1999·71 cites·12 claims
- 0257US5538609ACathodic sputtering systemLEYBOLD AG·Filed 1995·Granted Jul 23, 1996·14 cites·2 claims
- 0350US2016053361A1Carrier for a substrate and method for carrying a substrateAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 0441US5536380ALarge area sputter cathode having floating target segmentsLEYBOLD AG·Filed 1995·Granted Jul 16, 1996·10 cites·11 claims
- 0534US2019249294A1Carrier for holding a substrate, use of the carrier in a processing system, processing system employing the carrier, and method for controlling a temperature of a substrateAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 0629US2012048186A1Carrier for a substrate and a method for assembling the sameBRUENING ANDRE·Filed 2010·Application pending·0 cites
- 0722US8758579B2Chamber for physical vapour deposition and door for a physical vapour deposition chamberHINTERSCHUSTER REINER·Filed 2010·Granted Jun 24, 2014·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →