Inventor · disambiguated record
Rex Runyon
Also filed as: RUNYON REX
9 granted patents·83 citations·filing 2002–2016
87Inventor score
Top patents by PatentIndex Score
9 records- 0191US8194301B2Multi-spot scanning system and methodZHAO GUOHENG·Filed 2008·Granted Jun 5, 2012·20 cites·8 claims
- 0289US9395340B2Interleaved acousto-optical device scanning for suppression of optical crosstalkKLA TENCOR CORP·Filed 2013·Granted Jul 19, 2016·8 cites·26 claims
- 0386US9645093B2System and method for apodization in a semiconductor device inspection systemKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·3 cites·46 claims
- 0484US9176069B2System and method for apodization in a semiconductor device inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 3, 2015·5 cites·44 claims
- 0581US8294125B2High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting apertureHAN LIQUN·Filed 2009·Granted Oct 23, 2012·11 cites·18 claims
- 0680US6686995B2Two-dimensional UV compatible programmable spatial filterKLA TENCOR TECH CORP·Filed 2002·Granted Feb 3, 2004·26 cites·30 claims
- 0764US8461526B2Electron beam column and methods of using sameMANKOS MARIAN·Filed 2010·Granted Jun 11, 2013·2 cites·15 claims
- 0860US6686994B2UV compatible programmable spatial filterKLA TENCOR TECH CORP·Filed 2002·Granted Feb 3, 2004·8 cites·31 claims
- 0959US10060884B2Interleaved acousto-optical device scanning for suppression of optical crosstalkKLA TENCOR CORP·Filed 2016·Granted Aug 28, 2018·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →