Inventor · disambiguated record
Rebecca A. Sawayda
Also filed as: SAWAYDA REBECCA A
5 granted patents·1 pending application·4 citations·filing 2008–2013
68Inventor score
Top patents by PatentIndex Score
6 records- 0167US8841216B2Method and composition for chemical mechanical planarization of a metalAIR PROD & CHEM·Filed 2013·Granted Sep 23, 2014·2 cites·9 claims
- 0261US8252688B2Method and composition for chemical mechanical planarization of a metal or a metal alloySHI XIAOBO·Filed 2009·Granted Aug 28, 2012·1 cites·15 claims
- 0358US8414789B2Method and composition for chemical mechanical planarization of a metalSHI XIAOBO·Filed 2009·Granted Apr 9, 2013·1 cites·8 claims
- 0447US8697577B2Method and composition for chemical mechanical planarization of a metal or a metal alloySHI XIAOBO·Filed 2012·Granted Apr 15, 2014·0 cites·8 claims
- 0547US8506661B2Polishing slurry for copper filmsSAWAYDA REBECCA A·Filed 2008·Granted Aug 13, 2013·0 cites·27 claims
- 0644US2010081279A1Method for Forming Through-base Wafer Vias in Fabrication of Stacked DevicesDUPONT AIR PROD NANOMATERIALS·Filed 2008·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Rebecca A. Sawayda files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →