Inventor · disambiguated record
Richard A. Farrell
Also filed as: FARRELL RICHARD · FARRELL RICHARD A
25 granted patents·10 pending applications·88 citations·filing 1999–2024
93Inventor score
Files withGLOBALFOUNDRIES INC16TOKYO ELECTRON LTD11META PLATFORMS TECH LLC4FACEBOOK TECH LLC1FARRELL RICHARD A1
Top patents by PatentIndex Score
35 records- 0193US10727057B2Platform and method of operating for integrated end-to-end self-aligned multi-patterning processTOKYO ELECTRON LTD·Filed 2019·Granted Jul 28, 2020·10 cites·20 claims
- 0291US8853101B1Methods for fabricating integrated circuits including formation of chemical guide patterns for directed self-assembly lithographyGLOBALFOUNDRIES INC·Filed 2013·Granted Oct 7, 2014·13 cites·20 claims
- 0389US8889343B2Optimizing lithographic processes using laser annealing techniquesGLOBALFOUNDRIES INC·Filed 2012·Granted Nov 18, 2014·6 cites·22 claims
- 0486US10319637B2Method for fully self-aligned via formation using a directed self assembly (DSA) processTOKYO ELECTRON LTD·Filed 2017·Granted Jun 11, 2019·5 cites·21 claims
- 0582US8906802B2Methods of forming trench/via features in an underlying structure using a process that includes a masking layer formed by a directed self-assembly processGLOBALFOUNDRIES INC·Filed 2013·Granted Dec 9, 2014·5 cites·12 claims
- 0678US12468084B2Systems and methods of making polymeric optical layers for optical layeringFACEBOOK TECH LLC·Filed 2022·Granted Nov 11, 2025·0 cites·20 claims
- 0773US9613807B2Methods for fabricating integrated circuits using directed self-assembly chemoepitaxyGLOBALFOUNDRIES INC·Filed 2015·Granted Apr 4, 2017·2 cites·8 claims
- 0871US9530689B2Methods for fabricating integrated circuits using multi-patterning processesGLOBALFOUNDRIES INC·Filed 2015·Granted Dec 27, 2016·2 cites·12 claims
- 0971US9508562B2Sidewall image templates for directed self-assembly materialsGLOBALFOUNDRIES INC·Filed 2014·Granted Nov 29, 2016·2 cites·20 claims
- 1071US9478506B2Multilayer pattern transfer for chemical guidesGLOBALFOUNDRIES INC·Filed 2013·Granted Oct 25, 2016·2 cites·13 claims
- 1167US10141183B2Methods of spin-on deposition of metal oxidesTOKYO ELECTRON LTD·Filed 2017·Granted Nov 27, 2018·1 cites·16 claims
- 1263US12216400B2Directed self-assemblyTOKYO ELECTRON LTD·Filed 2021·Granted Feb 4, 2025·0 cites·20 claims
- 1362US2025093560A1Methods for fabricating surface-relief grating based architectures using fusion bondingMETA PLATFORMS TECH LLC·Filed 2024·Application pending·0 cites
- 1461US9275896B2Methods for fabricating integrated circuits using directed self-assemblyGLOBALFOUNDRIES INC·Filed 2014·Granted Mar 1, 2016·1 cites·13 claims
- 1560US2023160820A1Tunable shrinkage and trim process for fabricating gratingsMETA PLATFORMS TECH LLC·Filed 2022·Application pending·0 cites
- 1658US9698025B2Directed self-assembly material growth mask for forming vertical nanowiresGLOBALFOUNDRIES INC·Filed 2014·Granted Jul 4, 2017·0 cites·19 claims
- 1757US2025085475A1Systems and methods for improved data transmissionMETA PLATFORMS TECH LLC·Filed 2023·Application pending·0 cites
- 1855US11398379B2Platform and method of operating for integrated end-to-end self-aligned multi-patterning processTOKYO ELECTRON LTD·Filed 2019·Granted Jul 26, 2022·0 cites·19 claims
- 1953US10978307B2Deposition processTOKYO ELECTRON LTD·Filed 2020·Granted Apr 13, 2021·0 cites·20 claims
- 2053US10685847B2Vertical nanowires formed on upper fin surfaceGLOBALFOUNDRIES INC·Filed 2017·Granted Jun 16, 2020·0 cites·14 claims
- 2153US2023037929A1Selective deposition/patterning for layered waveguide fabricationMETA PLATFORMS TECH LLC·Filed 2022·Application pending·0 cites
- 2251US11841617B2Method of forming a narrow trenchTOKYO ELECTRON LTD·Filed 2020·Granted Dec 12, 2023·0 cites·20 claims
- 2351US11567407B2Method for globally adjusting spacer critical dimension using photo-active self-assembled monolayerTOKYO ELECTRON LTD·Filed 2019·Granted Jan 31, 2023·0 cites·18 claims
- 2449US11676817B2Method for pitch split patterning using sidewall image transferTOKYO ELECTRON LTD·Filed 2020·Granted Jun 13, 2023·0 cites·17 claims
- 2549US9865682B2Directed self-assembly material etch mask for forming vertical nanowiresGLOBALFOUNDRIES INC·Filed 2014·Granted Jan 9, 2018·0 cites·19 claims
- 2647US10186577B2Multiple directed self-assembly material mask patterning for forming vertical nanowiresGLOBALFOUNDRIES INC·Filed 2014·Granted Jan 22, 2019·0 cites·20 claims
- 2746US9455154B2Methods for fabricating guide patterns and methods for fabricating integrated circuits using such guide patternsGLOBALFOUNDRIES INC·Filed 2013·Granted Sep 27, 2016·0 cites·20 claims
- 2845US8969207B2Methods of forming a masking layer for patterning underlying structuresGLOBALFOUNDRIES INC·Filed 2013·Granted Mar 3, 2015·0 cites·28 claims
- 2943US2015303055A1Methods for fabricating integrated circuits including surface treating for directed self-assemblyGLOBALFOUNDRIES INC·Filed 2014·Application pending·0 cites
- 3042US6511420B1Video opto-diagnostic instrument with single-adjustment focusUNIV JOHNS HOPKINS·Filed 1999·Granted Jan 28, 2003·39 cites·22 claims
- 3141US2014377965A1Directed self-assembly (dsa) formulations used to form dsa-based lithography filmsGLOBALFOUNDRIES INC·Filed 2013·Application pending·0 cites
- 3241US2005234300A1Video opto-diagnostic instrument with single-adjustment focusFARRELL RICHARD A·Filed 2005·Application pending·0 cites
- 3339US2018138078A1Method for Regulating Hardmask Over-Etch for Multi-Patterning ProcessesTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 3438US2018323061A1Self-Aligned Triple Patterning Process Utilizing Organic SpacersTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 3534US2003114733A1Video opto-diagnostic instrument with single-adjustment focusFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →