Inventor · disambiguated record
Richard J. Markle
Also filed as: MARKLE RICHARD J
40 granted patents·1 pending application·855 citations·filing 1995–2007
98Inventor score
Files withADVANCED MICRO DEVICES INC37GLOBALFOUNDRIES INC2ADVANCED MIRCO DEVICES INC1MARKLE RICHARD J1
Top patents by PatentIndex Score
41 records- 0195US6594589B1Method and apparatus for monitoring tool healthADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 15, 2003·77 cites·51 claims
- 0294US7289867B1Automated integrated circuit device manufacturing facility using distributed controlADVANCED MICRO DEVICES INC·Filed 2005·Granted Oct 30, 2007·36 cites·41 claims
- 0393US6716646B1Method and apparatus for performing overlay measurements using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 6, 2004·69 cites·12 claims
- 0492US7445945B1Method and apparatus for dynamic adjustment of a sampling plan based on wafer electrical test dataADVANCED MICRO DEVICES INC·Filed 2005·Granted Nov 4, 2008·18 cites·16 claims
- 0591US7257458B1Automated integrated circuit device manufacturing facility using central controlADVANCED MICRO DEVICES INC·Filed 2005·Granted Aug 14, 2007·26 cites·25 claims
- 0688US6790376B1Process control based upon weight or mass measurements, and systems for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 14, 2004·41 cites·95 claims
- 0786US7100081B1Method and apparatus for fault classification based on residual vectorsADVANCED MICRO DEVICES INC·Filed 2003·Granted Aug 29, 2006·26 cites·42 claims
- 0886US6639663B1Method and apparatus for detecting processing faults using scatterometry measurementsADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 28, 2003·28 cites·14 claims
- 0986US6529282B1Method of controlling photolithography processes based upon scatterometric measurements of photoresist thickness, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Mar 4, 2003·26 cites·74 claims
- 1085US7292959B1Total tool control for semiconductor manufacturingADVANCED MIRCO DEVICES INC·Filed 2006·Granted Nov 6, 2007·14 cites·39 claims
- 1185US6650423B1Method and apparatus for determining column dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 18, 2003·34 cites·59 claims
- 1283US7262864B1Method and apparatus for determining grid dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 28, 2007·22 cites·47 claims
- 1383US6563300B1Method and apparatus for fault detection using multiple tool error signalsADVANCED MICRO DEVICES INC·Filed 2001·Granted May 13, 2003·28 cites·52 claims
- 1482US7153709B1Method and apparatus for calibrating degradable components using process state dataADVANCED MICRO DEVICES INC·Filed 2004·Granted Dec 26, 2006·24 cites·23 claims
- 1581US7402257B1Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Jul 22, 2008·25 cites·9 claims
- 1681US6701206B1Method and system for controlling a process toolADVANCED MICRO DEVICES INC·Filed 2002·Granted Mar 2, 2004·30 cites·35 claims
- 1778US6907369B1Method and apparatus for modifying design constraints based on observed performanceADVANCED MICRO DEVICES INC·Filed 2003·Granted Jun 14, 2005·22 cites·29 claims
- 1878US6677170B1Method for determining process layer thickness using scatterometry measurementsADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 13, 2004·15 cites·28 claims
- 1975US7031793B1Conflict resolution among multiple controllersADVANCED MICRO DEVICES INC·Filed 2002·Granted Apr 18, 2006·20 cites·24 claims
- 2075US6815235B1Methods of controlling formation of metal silicide regions, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 9, 2004·19 cites·90 claims
- 2175US6621412B1Troubleshooting method involving image-based fault detection and classification (FDC) and troubleshooting guide (TSG), and systems embodying the methodADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 16, 2003·21 cites·22 claims
- 2275US6046796AMethodology for improved semiconductor process monitoring using optical emission spectroscopyADVANCED MICRO DEVICES INC·Filed 1998·Granted Apr 4, 2000·56 cites·12 claims
- 2374US7321993B1Method and apparatus for fault detection classification of multiple tools based upon external dataADVANCED MICRO DEVICES INC·Filed 2004·Granted Jan 22, 2008·17 cites·55 claims
- 2474US5999886AMeasurement system for detecting chemical species within a semiconductor processing device chamberADVANCED MICRO DEVICES INC·Filed 1997·Granted Dec 7, 1999·51 cites·26 claims
- 2573US6960774B2Fault detection and control methodologies for ion implantation processes, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2003·Granted Nov 1, 2005·10 cites·45 claims
- 2669US6875622B1Method and apparatus for determining electromagnetic properties of a process layer using scatterometry measurementsADVANCED MICRO DEVICES INC·Filed 2002·Granted Apr 5, 2005·7 cites·33 claims
- 2768US6925347B1Process control based on an estimated process resultADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 2, 2005·13 cites·29 claims
- 2868US6794299B1Various methods of controlling conformal film deposition processes, and a system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 21, 2004·12 cites·29 claims
- 2967US6991945B1Fault detection spanning multiple processesADVANCED MICRO DEVICES INC·Filed 2002·Granted Jan 31, 2006·11 cites·21 claims
- 3064US6804014B1Method and apparatus for determining contact opening dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 12, 2004·7 cites·74 claims
- 3162US6988225B1Verifying a fault detection result based on a process control stateADVANCED MICRO DEVICES INC·Filed 2002·Granted Jan 17, 2006·8 cites·28 claims
- 3261US6660651B1Adjustable wafer stage, and a method and system for performing process operations using sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 9, 2003·7 cites·86 claims
- 3359US7774670B2Method and apparatus for dynamically determining tester recipesGLOBALFOUNDRIES INC·Filed 2007·Granted Aug 10, 2010·3 cites·12 claims
- 3457US6602723B1Method of integrating scatterometry metrology structures directly into die designADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 5, 2003·5 cites·27 claims
- 3550US7337091B1Method and apparatus for coordinating fault detection settings and process control changesADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 26, 2008·2 cites·13 claims
- 3650US7254453B2Secondary process controller for supplementing a primary process controllerADVANCED MICRO DEVICES INC·Filed 2002·Granted Aug 7, 2007·2 cites·36 claims
- 3750US5686996ADevice and method for aligning a laserADVANCED MICRO DEVICES INC·Filed 1995·Granted Nov 11, 1997·21 cites·23 claims
- 3848US6790683B1Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing sameADVANCED MICRO DEVICES INC·Filed 2002·Granted Sep 14, 2004·2 cites·47 claims
- 3942US7695986B1Method and apparatus for modifying process selectivities based on process state informationGLOBALFOUNDRIES INC·Filed 2005·Granted Apr 13, 2010·0 cites·14 claims
- 4042US7502702B1Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivitiesADVANCED MICRO DEVICES INC·Filed 2005·Granted Mar 10, 2009·0 cites·22 claims
- 4140US2006058979A1Method and system for calibrating integrated metrology systems and stand-alone metrology systems that acquire wafer state dataMARKLE RICHARD J·Filed 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Richard J. Markle files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →