Inventor · disambiguated record
Ricky Marsh
Also filed as: MARSH RICKY · MARSH RICKY DALE
17 granted patents·2 pending applications·228 citations·filing 1996–2025
94Inventor score
Top patents by PatentIndex Score
19 records- 0198US10264663B1Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2017·Granted Apr 16, 2019·29 cites·46 claims
- 0297US11716805B2Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2021·Granted Aug 1, 2023·4 cites·20 claims
- 0397US9059678B2TCCT match circuit for plasma etch chambersLAM RES CORP·Filed 2013·Granted Jun 16, 2015·29 cites·12 claims
- 0496US11224116B2Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2020·Granted Jan 11, 2022·4 cites·19 claims
- 0596US10638593B2Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2019·Granted Apr 28, 2020·10 cites·20 claims
- 0689US2025106976A1Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2024·Application pending·0 cites
- 0787US9293353B2Faraday shield having plasma density decoupling structure between TCP coil zonesLONG MAOLIN·Filed 2012·Granted Mar 22, 2016·8 cites·10 claims
- 0884US12193138B2Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2023·Granted Jan 7, 2025·0 cites·14 claims
- 0983US12507338B2Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2025·Granted Dec 23, 2025·0 cites·30 claims
- 1083US5933314AMethod and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucksLAM RES CORP·Filed 1997·Granted Aug 3, 1999·98 cites·17 claims
- 1182US12490370B2Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2025·Granted Dec 2, 2025·0 cites·30 claims
- 1282US12484139B2Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2025·Granted Nov 25, 2025·0 cites·30 claims
- 1382US12471202B2Matchless plasma source for semiconductor wafer fabricationLAM RES CORP·Filed 2025·Granted Nov 11, 2025·0 cites·13 claims
- 1480US9978565B2Systems for cooling RF heated chamber componentsMCCHESNEY JON·Filed 2011·Granted May 22, 2018·4 cites·20 claims
- 1576US10056231B2TCCT match circuit for plasma etch chambersLAM RES CORP·Filed 2015·Granted Aug 21, 2018·2 cites·13 claims
- 1674USD405443SAircraft personal video monitorAUDIO INT INC·Filed 1996·Granted Feb 9, 1999·21 cites·1 claims
- 1750US6553853B2Plasma probe and method for making sameLAM RES CORP·Filed 2002·Granted Apr 29, 2003·5 cites·3 claims
- 1847US2016163569A1Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil ZonesLAM RES CORP·Filed 2016·Application pending·0 cites
- 1946US6357308B1Plasma probe and method for making sameLAM RES CORP·Filed 1999·Granted Mar 19, 2002·14 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →