Inventor · disambiguated record
Richard W. Solarz
Also filed as: SOLARZ RICHARD · SOLARZ RICHARD W · SOLARZ RICHARD WILLIAM
17 granted patents·1 pending application·109 citations·filing 2001–2017
93Inventor score
Top patents by PatentIndex Score
18 records- 0196US7295739B2Coherent DUV illumination for semiconductor wafer inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Nov 13, 2007·36 cites·24 claims
- 0293US9723703B2System and method for transverse pumping of laser-sustained plasmaKLA TENCOR CORP·Filed 2015·Granted Aug 1, 2017·14 cites·31 claims
- 0387US9615439B2System and method for inhibiting radiative emission of a laser-sustained plasma sourceKLA TENCOR CORP·Filed 2016·Granted Apr 4, 2017·5 cites·31 claims
- 0484US9519033B2High throughput hot testing method and system for high-brightness light-emitting diodesKLA TENCOR CORP·Filed 2015·Granted Dec 13, 2016·2 cites·26 claims
- 0583US8927944B2High throughput hot testing method and system for high-brightness light-emitting diodesKLA TENCOR CORP·Filed 2012·Granted Jan 6, 2015·3 cites·27 claims
- 0682US8553217B2EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafersCHUANG YUNG-HO·Filed 2010·Granted Oct 8, 2013·3 cites·56 claims
- 0781US9377414B2EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafersKLA TENCOR CORP·Filed 2014·Granted Jun 28, 2016·2 cites·18 claims
- 0881US8698399B2Multi-wavelength pumping to sustain hot plasmaBEZEL ILYA V·Filed 2010·Granted Apr 15, 2014·8 cites·19 claims
- 0981US8649646B2Coherent DUV illumination for semiconductor wafer inspectionSOLARZ RICHARD WILLIAM·Filed 2007·Granted Feb 11, 2014·8 cites·24 claims
- 1078US8575576B2Optical imaging system with laser droplet plasma illuminatorSOLARZ RICHARD W·Filed 2011·Granted Nov 5, 2013·6 cites·27 claims
- 1175US9899205B2System and method for inhibiting VUV radiative emission of a laser-sustained plasma sourceKLA TENCOR CORP·Filed 2016·Granted Feb 20, 2018·2 cites·82 claims
- 1274US8692986B2EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafersKLA TENCOR CORP·Filed 2013·Granted Apr 8, 2014·1 cites·19 claims
- 1365US6738399B1Microchannel cooled edge cladding to establish an adiabatic boundary condition in a slab laserUS ENERGY·Filed 2001·Granted May 18, 2004·8 cites·8 claims
- 1465US6661580B1High transmission optical inspection toolsKLA TENCOR TECH CORP·Filed 2002·Granted Dec 9, 2003·9 cites·32 claims
- 1564US9735534B2Sub 200nm laser pumped homonuclear excimer lasersKLA TENCOR CORP·Filed 2014·Granted Aug 15, 2017·1 cites·21 claims
- 1658US8218221B1Indium rich InGaN LED line monitorSOLARZ RICHARD W·Filed 2008·Granted Jul 10, 2012·1 cites·10 claims
- 1737US11035804B2System and method for x-ray imaging and classification of volume defectsKLA TENCOR CORP·Filed 2017·Granted Jun 15, 2021·0 cites·51 claims
- 1837US2015194565A1Solid State Light Production Using Flexible Grouping Of LEDsKLA TENCOR CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →