Inventor · disambiguated record
Robert A. Bergstedt
Also filed as: BERGSTEDT ROBERT · BERGSTEDT ROBERT A
23 granted patents·2 pending applications·498 citations·filing 1997–2014
96Inventor score
Top patents by PatentIndex Score
25 records- 0197US7885309B2Laser systemCYMER INC·Filed 2007·Granted Feb 8, 2011·37 cites·23 claims
- 0296US7822092B2Laser systemCYMER INC·Filed 2007·Granted Oct 26, 2010·37 cites·15 claims
- 0395US8000212B2Metrology for extreme ultraviolet light sourceCYMER INC·Filed 2009·Granted Aug 16, 2011·25 cites·31 claims
- 0493US8126027B2Line narrowing moduleALGOTS J MARTIN·Filed 2011·Granted Feb 28, 2012·21 cites·20 claims
- 0592US8170078B2Laser systemERSHOV ALEXANDER I·Filed 2011·Granted May 1, 2012·11 cites·20 claims
- 0692US7999915B2Laser systemCYMER INC·Filed 2007·Granted Aug 16, 2011·15 cites·24 claims
- 0792US6154259AMulti-beam laser scanning display system with speckle eliminationPHOTERA TECHNOLOGIES INC·Filed 1997·Granted Nov 28, 2000·224 cites·26 claims
- 0891US7778302B2Laser systemCYMER INC·Filed 2007·Granted Aug 17, 2010·15 cites·24 claims
- 0988US9832853B2Alignment of light source focusASML NETHERLANDS BV·Filed 2014·Granted Nov 28, 2017·7 cites·25 claims
- 1088US8681427B2System and method for separating a main pulse and a pre-pulse beam from a laser sourceBERGSTEDT ROBERT A·Filed 2012·Granted Mar 25, 2014·20 cites·24 claims
- 1188US7653095B2Active bandwidth control for a laserCYMER INC·Filed 2005·Granted Jan 26, 2010·12 cites·28 claims
- 1288US7366219B2Line narrowing moduleCYMER INC·Filed 2004·Granted Apr 29, 2008·20 cites·112 claims
- 1387US8648999B2Alignment of light source focusGRAHAM MATTHEW R·Filed 2010·Granted Feb 11, 2014·9 cites·29 claims
- 1483US7746913B2Laser systemCYMER INC·Filed 2007·Granted Jun 29, 2010·7 cites·33 claims
- 1582US9239269B1Calibration of photoelectromagnetic sensor in a laser sourceASML NETHERLANDS BV·Filed 2014·Granted Jan 19, 2016·6 cites·11 claims
- 1680US7643528B2Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2007·Granted Jan 5, 2010·6 cites·11 claims
- 1778US8173985B2Beam transport system for extreme ultraviolet light sourceBERGSTEDT ROBERT A·Filed 2009·Granted May 8, 2012·13 cites·38 claims
- 1875US8284815B2Very high power laser chamber optical improvementsYE HONG·Filed 2009·Granted Oct 9, 2012·5 cites·13 claims
- 1971US8379687B2Gas discharge laser line narrowing moduleCYMER INC·Filed 2005·Granted Feb 19, 2013·4 cites·8 claims
- 2067US9239268B1Calibration of photoelectromagnetic sensor in a laser sourceASML NETHERLANDS BV·Filed 2014·Granted Jan 19, 2016·2 cites·13 claims
- 2167US8982922B2Very high power laser chamber optical improvementsYE HONG·Filed 2012·Granted Mar 17, 2015·2 cites·17 claims
- 2257US2010097704A1Line narrowing moduleCYMER INC·Filed 2009·Application pending·0 cites
- 2351US2010074295A1Immersion lithography laser light source with pulse stretcherCYMER INC·Filed 2009·Application pending·0 cites
- 2441US9127981B2System and method for return beam metrology with optical switchCymer LLC·Filed 2013·Granted Sep 8, 2015·0 cites·18 claims
- 2540US9374882B2Final focus assembly for extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2013·Granted Jun 21, 2016·0 cites·26 claims
Join the waitlist — get patent alerts
Get an alert when Robert A. Bergstedt files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →