Inventor · disambiguated record
Robert C. Hefty
Also filed as: HEFTY ROBERT · HEFTY ROBERT C · HEFTY ROBERT L
8 granted patents·3 pending applications·17 citations·filing 2001–2013
80Inventor score
Top patents by PatentIndex Score
11 records- 0185US9234775B2Methods for verifying gas flow rates from a gas supply system into a plasma processing chamberLAM RES CORP·Filed 2013·Granted Jan 12, 2016·6 cites·25 claims
- 0276US8394722B2Bi-layer, tri-layer mask CD controlDELGADINO GERARDO A·Filed 2008·Granted Mar 12, 2013·6 cites·14 claims
- 0367US8236188B2Method for low-K dielectric etch with reduced damageJI BING·Filed 2010·Granted Aug 7, 2012·2 cites·18 claims
- 0446US7291286B2Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatusesLAM RES CORP·Filed 2004·Granted Nov 6, 2007·2 cites·22 claims
- 0545US8114780B2Method for dielectric material removal between conductive linesBLOCK MAYUMI·Filed 2009·Granted Feb 14, 2012·0 cites·19 claims
- 0642US7226869B2Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processingLAM RES CORP·Filed 2004·Granted Jun 5, 2007·1 cites·38 claims
- 0741US2007021935A1Methods for verifying gas flow rates from a gas supply system into a plasma processing chamberLARSON DEAN J·Filed 2005·Application pending·0 cites
- 0841US2012237740A1Printing and pigmentation using quantum dot nanoparticlesHEFTY ROBERT C·Filed 2012·Application pending·0 cites
- 0939US7558641B2Recipe report card framework and methods thereofLAM RES CORP·Filed 2007·Granted Jul 7, 2009·0 cites·24 claims
- 1036US2003051145A1System for issuing and using secure cardsFiled 2001·Application pending·0 cites
- 1128US8906248B2Silicon on insulator etchLI SIYI·Filed 2011·Granted Dec 9, 2014·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →