Inventor · disambiguated record
Roy Winston Pascal
Also filed as: PASCAL ROY WINSTON
8 granted patents·101 citations·filing 1999–2002
86Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0178US6543084B2Wafer scrubbing brush coreLAM RES CORP·Filed 2001·Granted Apr 8, 2003·20 cites·5 claims
- 0270US6240588B1Wafer scrubbing brush coreLAM RES CORP·Filed 1999·Granted Jun 5, 2001·34 cites·20 claims
- 0365US6612315B2Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry moduleLAM RES CORP·Filed 2001·Granted Sep 2, 2003·9 cites·13 claims
- 0461US6415804B1Bowl for processing semiconductor wafersLAM RES CORP·Filed 1999·Granted Jul 9, 2002·23 cites·12 claims
- 0545US6558474B1Method for rinsing the backside of a semiconductor waferLAM RES CORP·Filed 2002·Granted May 6, 2003·1 cites·6 claims
- 0644US6497241B1Hollow core spindle and spin, rinse, and dry module including the sameLAM RES CORP·Filed 1999·Granted Dec 24, 2002·12 cites·18 claims
- 0731US6505417B2Method for controlling airflow on a backside of a semiconductor wafer during spin processingLAM RES CORP·Filed 1999·Granted Jan 14, 2003·2 cites·17 claims
- 0821US6434775B1Nozzle for rinsing the backside of a semiconductor waferLAM RES CORPORATON·Filed 1999·Granted Aug 20, 2002·0 cites·12 claims
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