Inventor · disambiguated record
Ryuichi Kosuge
Also filed as: KOSUGE RYUICHI
19 granted patents·10 pending applications·76 citations·filing 2003–2022
91Inventor score
Top patents by PatentIndex Score
29 records- 0193US8382558B2Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and methodEBARA CORP·Filed 2010·Granted Feb 26, 2013·14 cites·10 claims
- 0293US7837534B2Apparatus for heating or cooling a polishing surface of a polishing apparatusEBARA CORP·Filed 2008·Granted Nov 23, 2010·26 cites·8 claims
- 0391US9434044B2Polishing apparatusEBARA CORP·Filed 2015·Granted Sep 6, 2016·8 cites·14 claims
- 0482US9522453B2Polishing apparatusEBARA CORP·Filed 2015·Granted Dec 20, 2016·2 cites·6 claims
- 0582US9174324B2Polishing apparatus with polishing head coverEBARA CORP·Filed 2014·Granted Nov 3, 2015·4 cites·17 claims
- 0678US9409277B2Polishing apparatus and polishing methodEBARA CORP·Filed 2013·Granted Aug 9, 2016·4 cites·6 claims
- 0772US7850817B2Polishing device and substrate processing deviceEBARA CORP·Filed 2003·Granted Dec 14, 2010·15 cites·9 claims
- 0870US10816259B2Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression methodEBARA CORP·Filed 2017·Granted Oct 27, 2020·1 cites·8 claims
- 0966US9144878B2Polishing apparatus and wear detection methodEBARA CORP·Filed 2014·Granted Sep 29, 2015·1 cites·14 claims
- 1061US11839948B2Polishing apparatusEBARA CORP·Filed 2019·Granted Dec 12, 2023·0 cites·10 claims
- 1161US11433502B2Polishing table and polishing apparatus having ihe sameEBARA CORP·Filed 2018·Granted Sep 6, 2022·0 cites·6 claims
- 1260US11980998B2Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquidEBARA CORP·Filed 2020·Granted May 14, 2024·0 cites·12 claims
- 1355US10661411B2Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surfaceEBARA CORP·Filed 2015·Granted May 26, 2020·0 cites·10 claims
- 1453US8298369B2Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquidMAEDA KOJI·Filed 2007·Granted Oct 30, 2012·1 cites·6 claims
- 1552US9028297B2Polishing apparatusEBARA CORP·Filed 2013·Granted May 12, 2015·0 cites·13 claims
- 1652US2023230863A1Substrate conveyance method, substrate processing device, and recording mediumEBARA CORP·Filed 2022·Application pending·0 cites
- 1750US9764446B2Rotary joint and polishing apparatusEBARA CORP·Filed 2015·Granted Sep 19, 2017·0 cites·11 claims
- 1850US2014030048A1Workpiece transport deviceEBARA CORP·Filed 2013·Application pending·0 cites
- 1950US2019299360A1Polishing apparatus and substrate processing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
- 2048US9530704B2Polishing apparatus and wear detection methodEBARA CORP·Filed 2015·Granted Dec 27, 2016·0 cites·16 claims
- 2148US2009067959A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2007·Application pending·0 cites
- 2247US2019351526A1Method of detecting a polishing surface of a polishing pad using a polishing head, and polishing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
- 2347US2015118944A1Polishing apparatus, method for attaching polishing pad, and method for replacing polishing padEBARA CORP·Filed 2014·Application pending·0 cites
- 2447US2016233118A1Workpiece transport deviceEBARA CORP·Filed 2016·Application pending·0 cites
- 2546US2012193506A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2012·Application pending·0 cites
- 2643US10926374B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 23, 2021·0 cites·8 claims
- 2743US10157762B2Substrate processing apparatus and substrate presence or absence checking method and programEBARA CORP·Filed 2017·Granted Dec 18, 2018·0 cites·6 claims
- 2843US2015017889A1Polishing apparatusEBARA CORP·Filed 2014·Application pending·0 cites
- 2942US2014080385A1Polishing apparatusEBARA CORP·Filed 2013·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Ryuichi Kosuge files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →