Inventor · disambiguated record
Ryuichiro Mitani
Also filed as: MITANI RYUICHIRO
4 granted patents·1 pending application·47 citations·filing 2004–2018
73Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0192US8554356B2Processing end point detection method, polishing method, and polishing apparatusSHIMIZU NOBURU·Filed 2007·Granted Oct 8, 2013·25 cites·9 claims
- 0276US7300332B2Polished state monitoring apparatus and polishing apparatus using the sameEBARA CORP·Filed 2004·Granted Nov 27, 2007·21 cites·16 claims
- 0365US10207390B2Processing end point detection method, polishing method, and polishing apparatusEBARA CORP·Filed 2013·Granted Feb 19, 2019·1 cites·12 claims
- 0440US10890899B2Method of semiconductor manufacturing apparatus and non-transitory computer-readable storage medium storing a program of causing computer to execute design method of semiconductor manufacturing apparatusEBARA CORP·Filed 2018·Granted Jan 12, 2021·0 cites·8 claims
- 0537US2013268106A1Remote monitoring system for polishing end point detection unitsEBARA CORP·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →