Inventor · disambiguated record
Satish Achanta
Also filed as: ACHANTA SATISH
6 granted patents·2 pending applications·11 citations·filing 2014–2020
74Inventor score
Top patents by PatentIndex Score
8 records- 0181US10192772B2Substrate table and lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·4 cites·20 claims
- 0280US10719019B2Substrate holder and a method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Jul 21, 2020·4 cites·20 claims
- 0374US11086234B2Substrate holder and a method of manufacturing a deviceASML NETHERLANDS BV·Filed 2018·Granted Aug 10, 2021·2 cites·20 claims
- 0463US9798251B2Object holder, lithographic apparatus, device manufacturing method, and method of manufacturing an object holderASML NETHERLANDS BV·Filed 2014·Granted Oct 24, 2017·1 cites·20 claims
- 0550US11988971B2Lithographic apparatus, substrate table, and methodASML HOLDING NV·Filed 2020·Granted May 21, 2024·0 cites·20 claims
- 0649US12117736B2Lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 15, 2024·0 cites·19 claims
- 0738US2021053177A1System, device and method for reconditioning a substrate supportASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 0833US2021223696A1Substrate, a substrate holder, a substrate coating apparatus, a method for coating the substrate and a method for removing the coatingASML NETHERLANDS BV·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →