Inventor · disambiguated record
Sarah Michelle Bobek
Also filed as: BOBEK SARAH · BOBEK SARAH MICHELLE
23 granted patents·9 pending applications·19 citations·filing 2018–2025
92Inventor score
Files withAPPLIED MATERIALS INC32
Top patents by PatentIndex Score
32 records- 0194US11469107B2Highly etch selective amorphous carbon filmAPPLIED MATERIALS INC·Filed 2020·Granted Oct 11, 2022·4 cites·20 claims
- 0292US11742185B2Uniform in situ cleaning and depositionAPPLIED MATERIALS INC·Filed 2021·Granted Aug 29, 2023·2 cites·9 claims
- 0392US11694902B2Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layersAPPLIED MATERIALS INC·Filed 2021·Granted Jul 4, 2023·2 cites·18 claims
- 0491US11674222B2Method of in situ ceramic coating depositionAPPLIED MATERIALS INC·Filed 2020·Granted Jun 13, 2023·2 cites·19 claims
- 0590US10727059B2Highly etch selective amorphous carbon filmAPPLIED MATERIALS INC·Filed 2018·Granted Jul 28, 2020·6 cites·20 claims
- 0687US12347653B2Uniform in situ cleaning and depositionAPPLIED MATERIALS INC·Filed 2023·Granted Jul 1, 2025·0 cites·19 claims
- 0785US11584994B2Pedestal for substrate processing chambersAPPLIED MATERIALS INC·Filed 2019·Granted Feb 21, 2023·1 cites·21 claims
- 0880US12000048B2Pedestal for substrate processing chambersAPPLIED MATERIALS INC·Filed 2023·Granted Jun 4, 2024·0 cites·20 claims
- 0979US12112949B2Highly etch selective amorphous carbon filmAPPLIED MATERIALS INC·Filed 2022·Granted Oct 8, 2024·0 cites·29 claims
- 1079US11600470B2Targeted heat control systemsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 7, 2023·2 cites·20 claims
- 1178US12014927B2Highly etch selective amorphous carbon filmAPPLIED MATERIALS INC·Filed 2022·Granted Jun 18, 2024·0 cites·20 claims
- 1277US12234549B2Method of in situ ceramic coating depositionAPPLIED MATERIALS INC·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 1377US12131913B2Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layersAPPLIED MATERIALS INC·Filed 2023·Granted Oct 29, 2024·0 cites·20 claims
- 1476US12334384B2Methods and apparatus for minimizing substrate backside damageAPPLIED MATERIALS INC·Filed 2023·Granted Jun 17, 2025·0 cites·17 claims
- 1576US12211728B2Electrostatic chuck design with improved chucking and arcing performanceAPPLIED MATERIALS INC·Filed 2023·Granted Jan 28, 2025·0 cites·20 claims
- 1676US2025125129A1Processing chamber deposition confinementAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1766US12211673B2Processing chamber deposition confinementAPPLIED MATERIALS INC·Filed 2020·Granted Jan 28, 2025·0 cites·10 claims
- 1864US11699577B2Treatment for high-temperature cleansAPPLIED MATERIALS INC·Filed 2021·Granted Jul 11, 2023·0 cites·20 claims
- 1962US10923334B2Selective deposition of hardmaskAPPLIED MATERIALS INC·Filed 2019·Granted Feb 16, 2021·0 cites·23 claims
- 2062US2024352580A1Side pumping chamber and downstream residue management hardwareAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2160US11682574B2Electrostatic chuck design with improved chucking and arcing performanceAPPLIED MATERIALS INC·Filed 2019·Granted Jun 20, 2023·0 cites·20 claims
- 2259US2025372379A1Hard mask stress modulation using low energy implantAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2359US2025060321A1Optical inspection of wafers in manufacturing systemsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2458US11756819B2Methods and apparatus for minimizing substrate backside damageAPPLIED MATERIALS INC·Filed 2020·Granted Sep 12, 2023·0 cites·10 claims
- 2558US2025357137A1Deposition film tuning and temperature tuning for etch uniformityAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2657US12444615B2Forming a doped hardmaskAPPLIED MATERIALS INC·Filed 2022·Granted Oct 14, 2025·0 cites·13 claims
- 2754US2025181067A1Fault event recovery in multi-slot processing chambersAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2851US2020140999A1Process chamber component cleaning methodAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 2950US11830706B2Heated pedestal design for improved heat transfer and temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Nov 28, 2023·0 cites·19 claims
- 3048US2023120710A1Downstream residue management hardwareAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3147US12100609B2Electrostatic chucking processAPPLIED MATERIALS INC·Filed 2020·Granted Sep 24, 2024·0 cites·17 claims
- 3244US2020249263A1Method and tool for electrostatic chuckingAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →