Inventor · disambiguated record
Satomi Hamada
Also filed as: HAMADA SATOMI
8 granted patents·12 pending applications·188 citations·filing 1996–2025
86Inventor score
Top patents by PatentIndex Score
20 records- 0182US5860181AMethod of and apparatus for cleaning workpieceEBARA CORP·Filed 1996·Granted Jan 19, 1999·64 cites·9 claims
- 0279US5966765ACleaning apparatusEBARA CORP·Filed 1997·Granted Oct 19, 1999·67 cites·17 claims
- 0378US11382412B2Method and apparatus for cleaning PVA brushEBARA CORP·Filed 2018·Granted Jul 12, 2022·1 cites·11 claims
- 0471US6106635AWashing method and washing apparatusEBARA CORP·Filed 1998·Granted Aug 22, 2000·41 cites·7 claims
- 0571US2025256308A1Substrate cleaning method and substrate cleaning apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 0666US2023234107A1Substrate cleaning method and substrate cleaning apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 0766US2025144674A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2025·Application pending·0 cites
- 0866US2025144675A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2025·Application pending·0 cites
- 0953US8608858B2Substrate cleaning apparatus and method for determining timing of replacement of cleaning memberHAMADA SATOMI·Filed 2005·Granted Dec 17, 2013·1 cites·13 claims
- 1053US2024351078A1Substrate cleaning device, substrate cleaning method, and substrate polishing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 1153US2021039142A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2019·Application pending·0 cites
- 1252US6595220B2Apparatus for conveying a workpieceEBARA CORP·Filed 2001·Granted Jul 22, 2003·3 cites·13 claims
- 1348US2008017220A1Apparatus for cleaning a substrate having metal interconnectsKODERA MASAKO·Filed 2007·Application pending·0 cites
- 1446US6221171B1Method and apparatus for conveying a workpieceEBARA CORP·Filed 1997·Granted Apr 24, 2001·11 cites·13 claims
- 1546US2010043839A1Substrate processing methodHAMADA SATOMI·Filed 2009·Application pending·0 cites
- 1640US10229841B2Wafer drying apparatus and wafer drying methodEBARA CORP·Filed 2016·Granted Mar 12, 2019·0 cites·8 claims
- 1740US2004177655A1Apparatus for cleaning a substrate having metal interconnectsFiled 2004·Application pending·0 cites
- 1838US2005026455A1Substrate processing apparatus and substrate processing methodFiled 2004·Application pending·0 cites
- 1937US2009081810A1Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2005·Application pending·0 cites
- 2035US2010212702A1Cleaning Member, Substrate Cleaning Apparatus and Substrate Processing ApparatusHAMADA SATOMI·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →