Inventor · disambiguated record
Sassan Roham
Also filed as: ROHAM SASSAN
3 granted patents·3 pending applications·622 citations·filing 2005–2022
77Inventor score
Top patents by PatentIndex Score
6 records- 0196US7327948B1Cast pedestal with heating element and coaxial heat exchangerNOVELLUS SYSTEMS INC·Filed 2005·Granted Feb 5, 2008·582 cites·22 claims
- 0294US7941039B1Pedestal heat transfer and temperature controlNOVELLUS SYSTEMS INC·Filed 2007·Granted May 10, 2011·36 cites·15 claims
- 0383US10302553B2Gas exhaust by-product measurement systemLAM RES CORP·Filed 2017·Granted May 28, 2019·4 cites·16 claims
- 0453US2023400847A1Predictive maintenance for semiconductor manufacturing equipmentLAM RES CORP·Filed 2021·Application pending·0 cites
- 0548US2023402259A1Localized plasma arc prevention via purge ringLAM RES CORP·Filed 2021·Application pending·0 cites
- 0644US2024378347A1Generating digital twins of semiconductor manufacturing equipmentLAM RES CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →