Inventor · disambiguated record
Scott Anderson Middlebrooks
Also filed as: MIDDLEBROOKS SCOTT · MIDDLEBROOKS SCOTT A · MIDDLEBROOKS SCOTT ANDERSON
48 granted patents·26 pending applications·342 citations·filing 2003–2025
98Inventor score
Files withASML NETHERLANDS BV57MIDDLEBROOKS SCOTT ANDERSON4MOS EVERHARDUS CORNELIS4MODEL PREDICTIVE SYSTEMS INC2CYGNUS AI INC1
Top patents by PatentIndex Score
74 records- 0198US8724087B2Inspection apparatus for lithographyVAN DE KERKHOF MARCUS ADRIANUS·Filed 2009·Granted May 13, 2014·87 cites·19 claims
- 0297US11940740B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2022·Granted Mar 26, 2024·2 cites·20 claims
- 0397US10642162B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2019·Granted May 5, 2020·8 cites·23 claims
- 0497US9946165B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2014·Granted Apr 17, 2018·19 cites·20 claims
- 0597US8706442B2Alignment system, lithographic system and methodMOS EVERHARDUS CORNELIS·Filed 2009·Granted Apr 22, 2014·89 cites·20 claims
- 0696US10274834B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2018·Granted Apr 30, 2019·15 cites·20 claims
- 0794US11119414B2Yield estimation and controlASML NETHERLANDS BV·Filed 2020·Granted Sep 14, 2021·5 cites·21 claims
- 0892US9910366B2Metrology method and apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 6, 2018·9 cites·20 claims
- 0991US10890540B2Object identification and comparisonASML NETHERLANDS BV·Filed 2018·Granted Jan 12, 2021·4 cites·20 claims
- 1090US11143970B2Method and apparatus for image analysisASML NETHERLANDS BV·Filed 2020·Granted Oct 12, 2021·2 cites·23 claims
- 1189US11379970B2Deep learning for semantic segmentation of patternASML NETHERLANDS BV·Filed 2019·Granted Jul 5, 2022·8 cites·20 claims
- 1289US10732513B2Method and apparatus for image analysisASML NETHERLANDS BV·Filed 2019·Granted Aug 4, 2020·4 cites·20 claims
- 1389US10627723B2Yield estimation and controlASML NETHERLANDS BV·Filed 2014·Granted Apr 21, 2020·11 cites·26 claims
- 1489US10437157B2Method and apparatus for image analysisASML NETHERLANDS BV·Filed 2015·Granted Oct 8, 2019·5 cites·20 claims
- 1587US12287584B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2023·Granted Apr 29, 2025·0 cites·20 claims
- 1687US12259659B2Aligning a distorted imageASML NETHERLANDS BV·Filed 2022·Granted Mar 25, 2025·1 cites·15 claims
- 1787US11847570B2Deep learning for semantic segmentation of patternASML NETHERLANDS BV·Filed 2022·Granted Dec 19, 2023·1 cites·20 claims
- 1887US8947630B2Lithographic apparatus and device manufacturing methodPADIY ALEXANDER VIKTOROVYCH·Filed 2011·Granted Feb 3, 2015·6 cites·27 claims
- 1985US2025264813A1Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 2084US10706534B2Method and apparatus for classifying a data point in imaging dataMIDDLEBROOKS SCOTT ANDERSON·Filed 2017·Granted Jul 7, 2020·7 cites·13 claims
- 2184US10295913B2Inspection method and apparatus, and corresponding lithographic apparatusASML NETHERLANDS BV·Filed 2012·Granted May 21, 2019·5 cites·16 claims
- 2284US8749786B2Inspection method and apparatus, and corresponding lithographic apparatusFUCHS ANDREAS·Filed 2010·Granted Jun 10, 2014·5 cites·11 claims
- 2384US7502715B1Observability in metrology measurementsASML NETHERLANDS BV·Filed 2005·Granted Mar 10, 2009·13 cites·11 claims
- 2483US10126662B2Metrology method and apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Nov 13, 2018·2 cites·12 claims
- 2581US10852646B2Displacement based overlay or alignmentASML NETHERLANDS BV·Filed 2017·Granted Dec 1, 2020·2 cites·21 claims
- 2681US9470986B2Inspection methods, inspection apparatuses, and lithographic apparatusesASML NETHERLANDS BV·Filed 2014·Granted Oct 18, 2016·3 cites·16 claims
- 2781US8612045B2Optimization method and a lithographic cellMOS EVERHARDUS CORNELIS·Filed 2009·Granted Dec 17, 2013·7 cites·12 claims
- 2879US11720029B2Method and apparatus for image analysisASML NETHERLANDS BV·Filed 2021·Granted Aug 8, 2023·0 cites·20 claims
- 2978US12271114B2Method and apparatus for predicting substrate imageASML NETHERLANDS BV·Filed 2020·Granted Apr 8, 2025·1 cites·20 claims
- 3078US10331041B2Metrology method and apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Jun 25, 2019·1 cites·12 claims
- 3178US2025391010A1System and method for generating predictive images for wafer inspection using machine learningASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 3277US11067901B2Method and apparatus for image analysisASML NETHERLANDS BV·Filed 2017·Granted Jul 20, 2021·1 cites·20 claims
- 3376US11442368B2Inspection tool, inspection method and computer program productASML NETHERLANDS BV·Filed 2019·Granted Sep 13, 2022·1 cites·20 claims
- 3475US12493247B2Method and system for predicting process information with a parameterized modelASML NETHERLANDS BV·Filed 2020·Granted Dec 9, 2025·1 cites·13 claims
- 3575US10607334B2Method and apparatus for image analysisASML NETHERLANDS BV·Filed 2015·Granted Mar 31, 2020·2 cites·20 claims
- 3675US2024412067A1Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A SubstrateASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 3774US11385550B2Methods and apparatus for obtaining diagnostic information relating to an industrial processASML NETHERLANDS BV·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 3874US8947642B2Method and apparatus for estimating model parameters of and controlling a lithographic apparatus by measuring a substrate property and using a polynomial modelMIDDLEBROOKS SCOTT ANDERSON·Filed 2011·Granted Feb 3, 2015·2 cites·17 claims
- 3971US11880640B2Systems and methods for predicting layer deformationASML NETHERLANDS BV·Filed 2023·Granted Jan 23, 2024·0 cites·20 claims
- 4070US10539882B2Methods and apparatus for obtaining diagnostic information, methods and apparatus for controlling an industrial processASML NETHERLANDS BV·Filed 2017·Granted Jan 21, 2020·1 cites·20 claims
- 4170US7089164B2Control of overlay registrationMODEL PREDICTIVE SYSTEMS INC·Filed 2003·Granted Aug 8, 2006·12 cites·29 claims
- 4268US11966168B2Method of measuring variation, inspection system, computer program, and computer systemASML NETHERLANDS BV·Filed 2021·Granted Apr 23, 2024·0 cites·20 claims
- 4368US2021405545A1Yield estimation and controlASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 4465US10725386B2Metrology method and apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jul 28, 2020·0 cites·20 claims
- 4561US11625520B2Systems and methods for predicting layer deformationASML NETHERLANDS BV·Filed 2018·Granted Apr 11, 2023·0 cites·20 claims
- 4660US2024233305A1Aligning a distorted imageASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 4759US2025284191A1Deep learning models for determining mask designs associated with semiconductor manufacturingASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 4858US2025299293A1Obtaining high resolution information from low resolution imagesASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 4957US2025355365A1Inference model trainingASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 5055US11131936B2Method of measuring variation, inspection system, computer program, and computer systemASML NETHERLANDS BV·Filed 2018·Granted Sep 28, 2021·0 cites·21 claims
Showing the top 50 of 74 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →