Inventor · disambiguated record
Scott C. Wackerman
Also filed as: WACKERMAN SCOTT C
5 granted patents·83 citations·filing 1998–2002
83Inventor score
Technology areasG03F
Top patents by PatentIndex Score
5 records- 0181US6468586B1Environment exchange control for material on a wafer surfaceSILICON VALLEY GROUP·Filed 2000·Granted Oct 22, 2002·15 cites·12 claims
- 0280US6254936B1Environment exchange control for material on a wafer surfaceSILICON VALLEY GROUP·Filed 1998·Granted Jul 3, 2001·33 cites·22 claims
- 0379US6844027B1Environment exchange control for material on a wafer surfaceASML HOLDING NV·Filed 2000·Granted Jan 18, 2005·13 cites·7 claims
- 0476US6780461B2Environment exchange control for material on a wafer surfaceASML HOLDING NV·Filed 2001·Granted Aug 24, 2004·16 cites·5 claims
- 0566US6911091B2Environment exchange control for material on a wafer surfaceASML NETHERLANDS BV·Filed 2002·Granted Jun 28, 2005·6 cites·35 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →