Inventor · disambiguated record
Seung Park
Also filed as: PARK SEUNG G · PARK SEUNG GYUN
2 granted patents·3 pending applications·30 citations·filing 2002–2005
62Inventor score
Top patents by PatentIndex Score
5 records- 0171US6761770B2Atmospheric pressure wafer processing reactor having an internal pressure control system and methodAVIZA TECH INC·Filed 2002·Granted Jul 13, 2004·18 cites·32 claims
- 0268US7470470B2System and method for forming multi-component dielectric filmsAVIZA TECH INC·Filed 2004·Granted Dec 30, 2008·12 cites·4 claims
- 0344US2005233156A1System and method for forming multi-component dielectric filmsAVIZA TECH INC·Filed 2005·Application pending·0 cites
- 0434US2003061991A1Protective shield and system for gas distributionASML US INC·Filed 2002·Application pending·0 cites
- 0530US2004018735A1Method of depositing an oxide film by chemical vapor depositionFiled 2003·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Seung Park files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →