Inventor · disambiguated record
Sergey Zalubovsky
Also filed as: ZALUBOVSKY SERGEY · ZALUBOVSKY SERGEY JOSEPH
7 granted patents·2 pending applications·32 citations·filing 2013–2025
81Inventor score
Top patents by PatentIndex Score
9 records- 0197US10775323B2Full beam metrology for X-ray scatterometry systemsKLA TENCOR CORP·Filed 2017·Granted Sep 15, 2020·19 cites·21 claims
- 0295US11519719B2Transmission small-angle X-ray scattering metrology systemKLA CORP·Filed 2020·Granted Dec 6, 2022·3 cites·20 claims
- 0391US11313816B2Full beam metrology for x-ray scatterometry systemsKLA CORP·Filed 2020·Granted Apr 26, 2022·2 cites·19 claims
- 0487US10767978B2Transmission small-angle X-ray scattering metrology systemKLA TENCOR CORP·Filed 2018·Granted Sep 8, 2020·4 cites·20 claims
- 0584US10748736B2Liquid metal rotating anode X-ray source for semiconductor metrologyKLA TENCOR CORP·Filed 2018·Granted Aug 18, 2020·4 cites·21 claims
- 0679US12320763B2Full beam metrology for x-ray scatterometry systemsKLA CORP·Filed 2022·Granted Jun 3, 2025·0 cites·20 claims
- 0758US2025305950A1Combined Ellipsometry and ScatterometryKLA CORP·Filed 2025·Application pending·0 cites
- 0855US2025292987A1High Brightness X-Ray Source For Semiconductor MetrologyKLA CORP·Filed 2025·Application pending·0 cites
- 0951US10580610B2Cold cathode switching device and converterGEN ELECTRIC·Filed 2013·Granted Mar 3, 2020·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →