Inventor · disambiguated record
Sharon Aharon
Also filed as: AHARON SHARON
5 granted patents·1 pending application·8 citations·filing 2016–2022
70Inventor score
Top patents by PatentIndex Score
6 records- 0184US10901325B2Determining the impacts of stochastic behavior on overlay metrology dataKLA TENCOR CORP·Filed 2018·Granted Jan 26, 2021·4 cites·28 claims
- 0281US10579768B2Process compatibility improvement by fill factor modulationKLA TENCOR CORP·Filed 2016·Granted Mar 3, 2020·3 cites·5 claims
- 0380US12013634B2Reduction or elimination of pattern placement error in metrology measurementsKLA TENCOR CORP·Filed 2022·Granted Jun 18, 2024·0 cites·11 claims
- 0474US11537043B2Reduction or elimination of pattern placement error in metrology measurementsKLA TENCOR CORP·Filed 2021·Granted Dec 27, 2022·0 cites·10 claims
- 0572US11101153B2Parameter-stable misregistration measurement amelioration in semiconductor devicesKLA CORP·Filed 2019·Granted Aug 24, 2021·1 cites·20 claims
- 0656US2019250504A1Reduction or elimination of pattern placement error in metrology measurementsKLA TENCOR CORP·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →