Inventor · disambiguated record
Shengwu Chang
Also filed as: CHANG SHENGWU
34 granted patents·3 pending applications·135 citations·filing 2002–2021
96Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT17APPLIED MATERIALS INC9VARIAN SEMICONDUCTOR EQUIPMENT ASS INC8CHANG SHENGWU3
Top patents by PatentIndex Score
37 records- 0194US11232925B2System and method for improved beam current from an ion sourceAPPLIED MATERIALS INC·Filed 2020·Granted Jan 25, 2022·4 cites·19 claims
- 0294US11120966B2System and method for improved beam current from an ion sourceAPPLIED MATERIALS INC·Filed 2020·Granted Sep 14, 2021·4 cites·16 claims
- 0390US8853653B1Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Oct 7, 2014·6 cites·16 claims
- 0490US7253423B2Technique for uniformity tuning in an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Aug 7, 2007·14 cites·25 claims
- 0590US7138768B2Indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Nov 21, 2006·49 cites·29 claims
- 0688US7355188B2Technique for uniformity tuning in an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Apr 8, 2008·13 cites·13 claims
- 0785US10665415B1Apparatus and method for controlling ion beam properties using electrostatic filterAPPLIED MATERIALS INC·Filed 2018·Granted May 26, 2020·3 cites·19 claims
- 0884US10504682B2Conductive beam optic containing internal heating elementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Dec 10, 2019·3 cites·18 claims
- 0981US7397047B2Technique for tuning an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 8, 2008·6 cites·25 claims
- 1080US10468224B2Apparatus and method for controlling ion beam properties using energy filterVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Nov 5, 2019·2 cites·16 claims
- 1178US7462844B2Method, system, and apparatus for improving doping uniformity in high-tilt ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 9, 2008·6 cites·26 claims
- 1271US10714301B1Conductive beam optics for reducing particles in ion implanterVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jul 14, 2020·1 cites·18 claims
- 1371US7459692B2Electron confinement inside magnet of ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 2, 2008·2 cites·23 claims
- 1470US9396903B1Apparatus and method to control ion beam currentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2015·Granted Jul 19, 2016·2 cites·19 claims
- 1570US9263231B2Moveable current sensor for increasing ion beam utilization during ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Feb 16, 2016·2 cites·20 claims
- 1670US7442944B2Ion beam implant current, spot width and position tuningVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Oct 28, 2008·9 cites·25 claims
- 1767US2021159043A1Apparatus and method for controlling ion beam using electostatic filterAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1866US9012337B2Platen controlCHANG SHENGWU·Filed 2011·Granted Apr 21, 2015·2 cites·14 claims
- 1965US8664619B2Hybrid electrostatic lens for improved beam transmissionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Mar 4, 2014·1 cites·19 claims
- 2064US9006692B2Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 14, 2015·1 cites·14 claims
- 2163US7622724B2High voltage insulator for preventing instability in an ion implanter due to triple-junction breakdownVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Nov 24, 2009·2 cites·21 claims
- 2262US10937624B2Apparatus and method for controlling ion beam using electrostatic filterAPPLIED MATERIALS INC·Filed 2018·Granted Mar 2, 2021·0 cites·19 claims
- 2359US8330125B2Ion beam tuningCHANG SHENGWU·Filed 2010·Granted Dec 11, 2012·1 cites·13 claims
- 2456US10790116B2Electostatic filter and method for controlling ion beam using electostatic filterAPPLIED MATERIALS INC·Filed 2018·Granted Sep 29, 2020·0 cites·20 claims
- 2555US10886098B2Electrostatic filter and ion implanter having asymmetric electrostatic configurationAPPLIED MATERIALS INC·Filed 2018·Granted Jan 5, 2021·0 cites·19 claims
- 2653US10804068B2Electostatic filter and method for controlling ion beam properties using electrostatic filterAPPLIED MATERIALS INC·Filed 2018·Granted Oct 13, 2020·0 cites·20 claims
- 2753US7045799B1Weakening focusing effect of acceleration-deceleration column of ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted May 16, 2006·2 cites·32 claims
- 2852US11011343B2High-current ion implanter and method for controlling ion beam using high-current ion implanterAPPLIED MATERIALS INC·Filed 2019·Granted May 18, 2021·0 cites·20 claims
- 2951US9281165B1Bias electrodes for tandem acceleratorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Mar 8, 2016·0 cites·17 claims
- 3050US10074514B1Apparatus and method for improved ion beam currentVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Sep 11, 2018·0 cites·20 claims
- 3150US9165744B2Apparatus for treating ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Oct 20, 2015·0 cites·19 claims
- 3248US9520204B2Cold stripper for high energy ion implanter with tandem acceleratorVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Dec 13, 2016·0 cites·19 claims
- 3346US9437341B2Method and apparatus for generating high current negative hydrogen ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Sep 6, 2016·0 cites·26 claims
- 3445US2015228445A1Method and apparatus for three dimensional ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Application pending·0 cites
- 3542US2006169922A1Ion implant ion beam parallelism and direction integrity determination and adjustingCHANG SHENGWU·Filed 2005·Application pending·0 cites
- 3640US9679745B2Controlling an ion beam in a wide beam current operation rangeVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jun 13, 2017·0 cites·20 claims
- 3737US9934928B2Source housing assembly for controlling ion beam extraction stability and ion beam currentVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Apr 3, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →