Inventor · disambiguated record
Shawn D. Eggum
Also filed as: EGGUM SHAWN D · EGGUM SHAWN DANIEL
25 granted patents·24 pending applications·466 citations·filing 1991–2024
96Inventor score
Top patents by PatentIndex Score
49 records- 0192US7168587B2Wafer carrier door and spring biased latching mechanismENTEGRIS INC·Filed 2005·Granted Jan 30, 2007·17 cites·5 claims
- 0289US11551957B2Purge connectors and modules for a substrate containerENTEGRIS INC·Filed 2020·Granted Jan 10, 2023·2 cites·20 claims
- 0385US6880718B2Wafer carrier door and spring biased latching mechanismENTEGRIS INC·Filed 2002·Granted Apr 19, 2005·28 cites·22 claims
- 0484US6428729B1Composite substrate carrierENTEGRIS INC·Filed 1999·Granted Aug 6, 2002·75 cites·11 claims
- 0583US7168564B2Composite substrate carrierENTEGRIS INC·Filed 2005·Granted Jan 30, 2007·6 cites·4 claims
- 0683US7115335B2Connector assembly for fluid transferENTEGRIS INC·Filed 2004·Granted Oct 3, 2006·24 cites·11 claims
- 0782US6871741B2Composite substrate carrierENTEGRIS INC·Filed 2002·Granted Mar 29, 2005·18 cites·13 claims
- 0881US6951284B2Wafer carrier with wafer retaining systemENTEGRIS INC·Filed 2002·Granted Oct 4, 2005·39 cites·24 claims
- 0981US6848578B2Wafer enclosure sealing arrangement for wafer containersENTEGRIS INC·Filed 2002·Granted Feb 1, 2005·26 cites·20 claims
- 1079US12062560B2Reticle pod having side containment of reticleENTEGRIS INC·Filed 2023·Granted Aug 13, 2024·0 cites·6 claims
- 1179US11594437B2Reticle pod having side containment of reticleENTEGRIS INC·Filed 2020·Granted Feb 28, 2023·1 cites·12 claims
- 1279US6039186AComposite transport carrierFLUOROWARE INC·Filed 1998·Granted Mar 21, 2000·80 cites·18 claims
- 1377US8734698B2Composite substrate carrierENTEGRIS INC·Filed 2013·Granted May 27, 2014·2 cites·2 claims
- 1477US6811029B2Wafer support attachment for a semi-conductor wafer transport containerENTEGRIS INC·Filed 2002·Granted Nov 2, 2004·17 cites·15 claims
- 1572US5123681ALatch for wafer storage box for manual or robot operationFLUOROWARE INC·Filed 1991·Granted Jun 23, 1992·33 cites·8 claims
- 1670US2023377925A1Purge flow distribution system for a substrate container and method for performing the sameENTEGRIS INC·Filed 2023·Application pending·0 cites
- 1767US6808668B2Process for fabricating composite substrate carrierENTEGRIS INC·Filed 2002·Granted Oct 26, 2004·11 cites·13 claims
- 1867US2023128154A1Purge flow distribution system for a substrate container and method for performing the sameENTEGRIS INC·Filed 2022·Application pending·0 cites
- 1964US7131176B2Wafer support attachment for a semi-conductor wafer transport containerENTEGRIS INC·Filed 2004·Granted Nov 7, 2006·7 cites·11 claims
- 2064US2025029815A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 2163US12315749B2Methods of installing a purge fluid conditioning element into a semiconductor substrate carrying containerENTEGRIS INC·Filed 2022·Granted May 27, 2025·0 cites·19 claims
- 2263US6712213B2Wafer carrier door and latching mechanism withhourglass shaped key slotENTEGRIS INC·Filed 2002·Granted Mar 30, 2004·8 cites·26 claims
- 2363US6164530ADisk carrier with transponderFLUOROWARE INC·Filed 1994·Granted Dec 26, 2000·24 cites·7 claims
- 2463US2025029858A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 2563US2025029857A1Module retainerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 2663US2025029856A1Method and device for front gas delivery into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 2762US6955382B2Wafer carrier door and latching mechanism with c-shaped cam followerENTEGRIS INC·Filed 2002·Granted Oct 18, 2005·8 cites·14 claims
- 2862US6749067B2Wafer carrier door with form fitting mechanism coverENTEGRIS INC·Filed 2003·Granted Jun 15, 2004·8 cites·22 claims
- 2962US2024363380A1Method and device to distribute gas into a containerENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3062US2024412995A1Guided diffusion device brackets and methods for diffusion device retentionENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3162US2024412994A1Substrate container, and door locking mechanism thereofENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3261US2023099075A1Purge port filter supportENTEGRIS INC·Filed 2022·Application pending·0 cites
- 3358US2024222172A1Substrate container with purge gas diffuserENTEGRIS INC·Filed 2023·Application pending·0 cites
- 3457US5248033AHinged tilt box with inclined portionFLUOROWARE INC·Filed 1991·Granted Sep 28, 1993·32 cites·16 claims
- 3556US12140860B2Reticle pod with windowENTEGRIS INC·Filed 2020·Granted Nov 12, 2024·0 cites·15 claims
- 3654US2023131451A1Method and device to regulate purge into a containerENTEGRIS INC·Filed 2022·Application pending·0 cites
- 3754US2007193907A1Composite substrate carrierENTEGRIS INC·Filed 2007·Application pending·0 cites
- 3854US2020211876A1Reticle pod having side containment of reticleENTEGRIS INC·Filed 2017·Application pending·0 cites
- 3951US2010236970A1Composite substrate carrierENTEGRIS INC·Filed 2010·Application pending·0 cites
- 4047US2012061288A1Composite substrate carrierBHATT SANJIV M·Filed 2011·Application pending·0 cites
- 4146US11914287B2Container for holding and transporting reticles having a transparent window assemblyENTEGRIS INC·Filed 2018·Granted Feb 27, 2024·0 cites·6 claims
- 4246US2006060244A1Fuel cell manifoldEGGUM SHAWN D·Filed 2005·Application pending·0 cites
- 4344US2020144086A1Reticle support for a containerENTEGRIS INC·Filed 2019·Application pending·0 cites
- 4444US2005008930A1Core pin for a batteryFiled 2004·Application pending·0 cites
- 4542US2005081917A1Performance polymer film insert molding for fluid control devicesFiled 2002·Application pending·0 cites
- 4639US2003188990A1Composite kinematic couplingFiled 2002·Application pending·0 cites
- 4739US2003029765A1Composite kinematic couplingFiled 2002·Application pending·0 cites
- 4836US2005056601A1Semiconductor component handling device having an electrostatic dissipating filmFiled 2002·Application pending·0 cites
- 4930US2005236110A1Semiconductor component handling device having a performance filmBHATT SANJIV M·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →