Inventor · disambiguated record
Shigeru Ishizawa
Also filed as: ISHIZAWA SHIGERU
20 granted patents·7 pending applications·1,632 citations·filing 1995–2023
95Inventor score
Top patents by PatentIndex Score
27 records- 0198US7837425B2Transportation apparatus and drive mechanismTOKYO ELECTRON LTD·Filed 2004·Granted Nov 23, 2010·1.1k cites·29 claims
- 0296US6328864B1Vacuum processing apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Dec 11, 2001·304 cites·6 claims
- 0394US10490392B2Focus ring replacement method and plasma processing systemTOKYO ELECTRON LTD·Filed 2017·Granted Nov 26, 2019·9 cites·19 claims
- 0492US10403525B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2017·Granted Sep 3, 2019·7 cites·9 claims
- 0587US7622006B2Processed body carrying device, and processing system with carrying deviceTOKYO ELECTRON LTD·Filed 2002·Granted Nov 24, 2009·41 cites·13 claims
- 0687US7286890B2Transfer apparatus for target objectTOKYO ELECTRON LTD·Filed 2006·Granted Oct 23, 2007·13 cites·21 claims
- 0784US12094696B2Focus ring replacement method and plasma processing systemTOKYO ELECTRON LTD·Filed 2023·Granted Sep 17, 2024·0 cites·14 claims
- 0884US11990323B2Focus ring replacement method and plasma processing systemTOKYO ELECTRON LTD·Filed 2019·Granted May 21, 2024·2 cites·16 claims
- 0984US10468278B2Substrate transfer method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Nov 5, 2019·4 cites·9 claims
- 1078US6466835B1Deadlock avoidance method and treatment system for object to be treatedTOKYO ELECTRON LTD·Filed 2000·Granted Oct 15, 2002·22 cites·13 claims
- 1177US6510365B1Carrier system positioning methodTOKYO ELECTRON LTD·Filed 1999·Granted Jan 21, 2003·57 cites·20 claims
- 1274US7532940B2Transfer mechanism and semiconductor processing systemTOKYO ELECTRON LTD·Filed 2006·Granted May 12, 2009·5 cites·20 claims
- 1368US5754780AApparatus and method for performing serial communication between master and slave devicesTOKYO ELECTRON LTD·Filed 1995·Granted May 19, 1998·48 cites·25 claims
- 1465US6144926AMethod of sensing access positions of armTOKYO ELECTRON LTD·Filed 1998·Granted Nov 7, 2000·30 cites·19 claims
- 1560US6162010AMethod for recovering object to be treated after interruptionTOKYO ELECTRON LTD·Filed 1998·Granted Dec 19, 2000·26 cites·8 claims
- 1659US11069548B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2019·Granted Jul 20, 2021·0 cites·8 claims
- 1751US7780391B2Substrate processing deviceTOKYO ELECTRON LTD·Filed 2003·Granted Aug 24, 2010·3 cites·11 claims
- 1851US6983195B2Semiconductor processing system and method of transferring workpieceTOKYO ELECTRON LTD·Filed 2001·Granted Jan 3, 2006·4 cites·13 claims
- 1942US2019122870A1Focus ring replacement method and plasma processing systemTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 2042US2007107845A1Semiconductor processing systemISHIZAWA SHIGERU·Filed 2007·Application pending·0 cites
- 2140US7371683B2Method for carrying object to be processedTOKYO ELECTRON LTD·Filed 2003·Granted May 13, 2008·2 cites·15 claims
- 2237US2011108056A1Cleaning method for transfer arm, cleaning method for substrate processing apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 2337US2004238122A1Semiconductor processing systemFiled 2002·Application pending·0 cites
- 2435US2005220582A1Teaching method and processing systemTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 2534US2004043513A1Method of transferring processed body and processing system for processed bodyFiled 2001·Application pending·0 cites
- 2633US8663489B2Substrate replacing method and substrate processing apparatusISHIZAWA SHIGERU·Filed 2010·Granted Mar 4, 2014·0 cites·7 claims
- 2730US2012308341A1Substrate processing apparatus and method of controlling substrate processing apparatusISHIZAWA SHIGERU·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →