Inventor · disambiguated record
Shigeru Kasai
Also filed as: KASAI SHIGERU
92 granted patents·52 pending applications·2,153 citations·filing 1989–2025
99Inventor score
Top patents by PatentIndex Score
144 records- 0199US8041197B2Heating apparatus, heat treatment apparatus, computer program and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Oct 18, 2011·562 cites·21 claims
- 0298US9072158B2Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portionIKEDA TARO·Filed 2012·Granted Jun 30, 2015·189 cites·9 claims
- 0397US8246900B2Annealing apparatusKASAI SHIGERU·Filed 2007·Granted Aug 21, 2012·468 cites·18 claims
- 0497US7176634B2Coaxial type impedance matching device and impedance detecting method for plasma generationTOKYO ELECTRON LTD·Filed 2004·Granted Feb 13, 2007·115 cites·4 claims
- 0597US6436193B1Gas processing apparatus baffle member, and gas processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Aug 20, 2002·262 cites·13 claims
- 0695US8907259B2Microwave irradiation device and microwave irradiation methodKASAI SHIGERU·Filed 2011·Granted Dec 9, 2014·43 cites·14 claims
- 0794US11340283B2Testing deviceTOKYO ELECTRON LTD·Filed 2019·Granted May 24, 2022·9 cites·9 claims
- 0893US11247073B2Particle radiation therapy apparatusTOSHIBA KK·Filed 2020·Granted Feb 15, 2022·4 cites·9 claims
- 0993US9281154B2Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Mar 8, 2016·15 cites·17 claims
- 1092US8308898B2Tuner and microwave plasma sourceKASAI SHIGERU·Filed 2011·Granted Nov 13, 2012·19 cites·10 claims
- 1191US6483395B2Micro-machine (MEMS) switch with electrical insulatorNEC CORP·Filed 2001·Granted Nov 19, 2002·46 cites·42 claims
- 1290US8794073B2Structure for attaching vibration sensor to storage deviceKASAI SHIGERU·Filed 2010·Granted Aug 5, 2014·12 cites·15 claims
- 1390US7355379B2Coaxial type impedance matching device and impedance detecting method for plasma generationTOKYO ELECTRON LTD·Filed 2006·Granted Apr 8, 2008·16 cites·5 claims
- 1489US7661386B2Film forming deviceTOKYO ELECTRON LTD·Filed 2002·Granted Feb 16, 2010·41 cites·14 claims
- 1589US6530687B1Temperature measuring systemTOKYO ELECTRON LTD·Filed 2000·Granted Mar 11, 2003·49 cites·6 claims
- 1688US7445690B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Nov 4, 2008·15 cites·12 claims
- 1787US8128751B2Film-forming apparatusKASAI SHIGERU·Filed 2009·Granted Mar 6, 2012·11 cites·15 claims
- 1885US8107801B2Heat treatment apparatus, computer program, and storage mediumSHIMIZU MASAHIRO·Filed 2008·Granted Jan 31, 2012·10 cites·27 claims
- 1983US9663856B2Plasma processing apparatus and shower plateTOKYO ELECTRON LTD·Filed 2014·Granted May 30, 2017·5 cites·8 claims
- 2083US6819052B2Coaxial type impedance matching device and impedance detecting method for plasma generationJAPAN RADIO CO LTD·Filed 2003·Granted Nov 16, 2004·16 cites·2 claims
- 2181US8897631B2Annealing apparatusKASAI SHIGERU·Filed 2009·Granted Nov 25, 2014·8 cites·29 claims
- 2280US8110045B2Processing equipment for object to be processedYONEDA MASATAKE·Filed 2010·Granted Feb 7, 2012·6 cites·14 claims
- 2378US11221358B2Placement stand and electronic device inspecting apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jan 11, 2022·2 cites·15 claims
- 2477US7915827B2Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Mar 29, 2011·5 cites·9 claims
- 2577US7854962B2Gas supply method using a gas supply systemTOKYO ELECTRON LTD·Filed 2009·Granted Dec 21, 2010·7 cites·9 claims
- 2675US9543123B2Plasma processing apparatus and plasma generation antennaIKEDA TARO·Filed 2012·Granted Jan 10, 2017·1 cites·7 claims
- 2775US7846255B2Processing equipment for object to be processedTOKYO ELECTRON LTD·Filed 2005·Granted Dec 7, 2010·4 cites·14 claims
- 2874US10835766B2Particle beam treatment apparatusTOSHIBA KK·Filed 2019·Granted Nov 17, 2020·2 cites·5 claims
- 2974US7226524B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Jun 5, 2007·12 cites·12 claims
- 3073US11169204B2Temperature control device, temperature control method, and inspection apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Nov 9, 2021·1 cites·15 claims
- 3173US11125813B2ProberTOKYO ELECTRON LTD·Filed 2018·Granted Sep 21, 2021·1 cites·8 claims
- 3271US9552966B2Antenna for plasma generation, plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2012·Granted Jan 24, 2017·2 cites·16 claims
- 3371US8005352B2Heat treating deviceTOKYO ELECTRON LTD·Filed 2006·Granted Aug 23, 2011·3 cites·6 claims
- 3470US8945342B2Surface wave plasma generating antenna and surface wave plasma processing apparatusIKEDA TARO·Filed 2012·Granted Feb 3, 2015·2 cites·14 claims
- 3570US5445675ASemiconductor processing apparatusTEL VARIAN LIMITED·Filed 1993·Granted Aug 29, 1995·52 cites·17 claims
- 3669US9204500B2Microwave heating apparatus and processing methodTOKYO ELECTRON LTD·Filed 2012·Granted Dec 1, 2015·2 cites·9 claims
- 3768US8861110B2Failure prediction method and failure prediction systemTAKATA SOICHIRO·Filed 2012·Granted Oct 14, 2014·3 cites·16 claims
- 3867US8608121B2Device and method for fixing a reactor metering pipeMAEHARA TAKESHI·Filed 2008·Granted Dec 17, 2013·8 cites·12 claims
- 3967US7978963B2Thermal processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Jul 12, 2011·10 cites·4 claims
- 4066US10765387B2Position adjustment device for flat panel detector, position adjustment method for flat panel detector, and radiotherapy apparatusTOSHIBA ENERGY SYSTEMS & SOLUTIONS CORP·Filed 2018·Granted Sep 8, 2020·1 cites·11 claims
- 4166US9202731B2Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded thereinKASAI SHIGERU·Filed 2011·Granted Dec 1, 2015·2 cites·9 claims
- 4265US8891188B2Breakdown prediction device, breakdown prediction method, and breakdown prediction programKASAI SHIGERU·Filed 2011·Granted Nov 18, 2014·1 cites·7 claims
- 4365US2025327856A1Inspection system and temperature control methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 4464US9224623B2Microwave irradiation apparatusKASAI SHIGERU·Filed 2012·Granted Dec 29, 2015·2 cites·8 claims
- 4564US7768163B2MotorNIDEC SANKYO CORP·Filed 2008·Granted Aug 3, 2010·3 cites·9 claims
- 4664US7675207B2Motor deviceNIDEC SANKYO CORP·Filed 2008·Granted Mar 9, 2010·3 cites·8 claims
- 4764US6627859B1Method and apparatus for temperature control of heaterTOKYO ELECTRON LTD·Filed 1999·Granted Sep 30, 2003·30 cites·28 claims
- 4864US2025076232A1Inspection Apparatus and Mounting BaseTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 4963US9548187B2Microwave radiation antenna, microwave plasma source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jan 17, 2017·1 cites·7 claims
- 5063US8419960B2Plasma processing apparatus and methodSAWADA IKUO·Filed 2009·Granted Apr 16, 2013·2 cites·20 claims
Showing the top 50 of 144 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →