Inventor · disambiguated record
Shinji Komoto
Also filed as: KOMOTO SHINJI
5 granted patents·1 pending application·10 citations·filing 2008–2015
72Inventor score
Top patents by PatentIndex Score
6 records- 0182US8973527B2Plasma processing apparatus, plasma processing method, method for cleaning plasma processing apparatus and pressure control valve for plasma processing apparatusNOZAWA TOSHIHISA·Filed 2009·Granted Mar 10, 2015·4 cites·5 claims
- 0278US9574267B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Feb 21, 2017·2 cites·5 claims
- 0363US8419859B2Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning methodFUKIAGE NORIAKI·Filed 2008·Granted Apr 16, 2013·3 cites·8 claims
- 0453US8091863B2Gate valve and semiconductor manufacturing apparatusKOMOTO SHINJI·Filed 2009·Granted Jan 10, 2012·1 cites·10 claims
- 0547US2009194238A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0646US9631274B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Apr 25, 2017·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →