Inventor · disambiguated record
Shin-Yee Lu
Also filed as: LU SHIN-YEE
4 granted patents·432 citations·filing 1997–2023
76Inventor score
Top patents by PatentIndex Score
4 records- 0190US5852672AImage system for three dimensional, 360 DEGREE, time sequence surface mapping of moving objectsUNIV CALIFORNIA·Filed 1997·Granted Dec 22, 1998·406 cites·3 claims
- 0272US11989876B2Method and apparatus for inspecting pattern collapse defectsTOKYO ELECTRON LTD·Filed 2023·Granted May 21, 2024·0 cites·10 claims
- 0371US6898306B1Machine-independent alignment system and methodULTRATECH INC·Filed 2001·Granted May 24, 2005·26 cites·16 claims
- 0463US11676266B2Method and apparatus for inspecting pattern collapse defectsTOKYO ELECTRON LTD·Filed 2020·Granted Jun 13, 2023·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →