Inventor · disambiguated record
Shai Mark
Also filed as: MARK SHAI
7 granted patents·2 pending applications·3 citations·filing 2016–2024
71Inventor score
Top patents by PatentIndex Score
9 records- 0174US11569138B2System and method for monitoring parameters of a semiconductor factory automation systemKLA TENCOR CORP·Filed 2016·Granted Jan 31, 2023·3 cites·25 claims
- 0270US12370581B2In-situ process chamber chuck cleaning by cleaning substrateKLA CORP·Filed 2023·Granted Jul 29, 2025·0 cites·21 claims
- 0362US2024170318A1Teaching Substrate for Production and Process-Control ToolsKLA CORP·Filed 2024·Application pending·0 cites
- 0460US2023119169A1System and method for monitoring parameters of a semiconductor factory automation systemKLA CORP·Filed 2022·Application pending·0 cites
- 0557US11774866B2Active reticle carrier for in situ stage correctionKLA CORP·Filed 2021·Granted Oct 3, 2023·0 cites·18 claims
- 0656US12009227B2Electrostatic substrate cleaning system and methodKLA CORP·Filed 2022·Granted Jun 11, 2024·0 cites·20 claims
- 0756US11638938B2In situ process chamber chuck cleaning by cleaning substrateKLA CORP·Filed 2019·Granted May 2, 2023·0 cites·18 claims
- 0849US11908722B2Automatic teaching of substrate handling for production and process-control toolsKLA CORP·Filed 2020·Granted Feb 20, 2024·0 cites·18 claims
- 0947US11607716B1Systems and methods for chuck cleaningKLA CORP·Filed 2020·Granted Mar 21, 2023·0 cites·39 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →