Inventor · disambiguated record
Shigeo Moriyama
Also filed as: KITA TOSHIAKI · MORIYAMA SHIGEO
47 granted patents·4 pending applications·2,940 citations·filing 1974–2008
99Inventor score
Top patents by PatentIndex Score
51 records- 0199US5609511APolishing methodHITACHI LTD·Filed 1995·Granted Mar 11, 1997·413 cites·13 claims
- 0298US6850854B2Semiconductor production systemHITACHI LTD·Filed 2003·Granted Feb 1, 2005·294 cites·9 claims
- 0398US6591207B2Semiconductor production systemHITACHI LTD·Filed 2001·Granted Jul 8, 2003·217 cites·14 claims
- 0498US6077027ASemiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor deviceHITACHI LTD·Filed 1999·Granted Jun 20, 2000·418 cites·17 claims
- 0598US4409860AApparatus for precisely moving a tableHITACHI LTD·Filed 1980·Granted Oct 18, 1983·146 cites·11 claims
- 0696US4575942AUltra-precision two-dimensional moving apparatusHITACHI LTD·Filed 1983·Granted Mar 18, 1986·126 cites·15 claims
- 0793US4012843AConcave diffraction grating and a manufacturing method thereofHITACHI LTD·Filed 1974·Granted Mar 22, 1977·68 cites·7 claims
- 0891US4057347AOptical exposure apparatusHITACHI LTD·Filed 1976·Granted Nov 8, 1977·56 cites·5 claims
- 0990US5981399AMethod and apparatus for fabricating semiconductor devicesHITACHI LTD·Filed 1995·Granted Nov 9, 1999·114 cites·53 claims
- 1090US5222112AX-ray pattern masking by a reflective reduction projection optical systemHITACHI LTD·Filed 1991·Granted Jun 22, 1993·134 cites·36 claims
- 1189US6099393APolishing method for semiconductors and apparatus thereforHITACHI LTD·Filed 1998·Granted Aug 8, 2000·77 cites·22 claims
- 1288US6723144B2Semiconductor device fabricating methodHITACHI LTD·Filed 2002·Granted Apr 20, 2004·38 cites·16 claims
- 1388US5772780APolishing agent and polishing methodHITACHI LTD·Filed 1995·Granted Jun 30, 1998·68 cites·22 claims
- 1488US5025268AOptical scanning apparatus and asymmetrical aspheric scanning lensHITACHI LTD·Filed 1989·Granted Jun 18, 1991·65 cites·14 claims
- 1586US6043155APolishing agent and polishing methodHITACHI LTD·Filed 1998·Granted Mar 28, 2000·56 cites·2 claims
- 1686US5628828AProcessing method and equipment for processing a semiconductor device having holder/carrier with flattened surfaceHITACHI LTD·Filed 1995·Granted May 13, 1997·82 cites·17 claims
- 1785US4798470APattern printing method and apparatusHITACHI LTD·Filed 1986·Granted Jan 17, 1989·37 cites·9 claims
- 1885US4219933ADiffraction grating ruling engineHITACHI LTD·Filed 1979·Granted Sep 2, 1980·21 cites·4 claims
- 1984US4358198AApparatus for moving table on stageHITACHI LTD·Filed 1980·Granted Nov 9, 1982·58 cites·7 claims
- 2081US6336842B1Rotary machining apparatusHITACHI LTD·Filed 2000·Granted Jan 8, 2002·30 cites·8 claims
- 2181US5563465AActuatorHITACHI LTD·Filed 1994·Granted Oct 8, 1996·45 cites·16 claims
- 2281US5305364AProjection type X-ray lithography apparatusHITACHI LTD·Filed 1992·Granted Apr 19, 1994·38 cites·19 claims
- 2380US5411430AScanning optical device and method for making a hybrid scanning lens used thereforHITACHI LTD·Filed 1992·Granted May 2, 1995·31 cites·10 claims
- 2479US5408320AWorkpiece having alignment marks for positioning a pattern at a different pitch to be formed thereon, and method for fabricating the sameHITACHI LTD·Filed 1992·Granted Apr 18, 1995·29 cites·14 claims
- 2573US6180020B1Polishing method and apparatusHITACHI LTD·Filed 1995·Granted Jan 30, 2001·46 cites·24 claims
- 2671US6478977B1Polishing method and apparatusHITACHI LTD·Filed 2000·Granted Nov 12, 2002·15 cites·12 claims
- 2769US5107628AMethod of fabricating article having aspheric figure and tool for use in carrying out the methodHITACHI LTD·Filed 1989·Granted Apr 28, 1992·17 cites·14 claims
- 2869US4522660AProcess for ion nitriding of aluminum or an aluminum alloy and apparatus thereforTOYODA CHUO KENKYUSHO KK·Filed 1983·Granted Jun 11, 1985·21 cites·7 claims
- 2962US5272744AReflection maskHITACHI LTD·Filed 1992·Granted Dec 21, 1993·33 cites·16 claims
- 3062US5200798AMethod of position detection and the method and apparatus of printing patterns by use of the position detection methodHITACHI LTD·Filed 1991·Granted Apr 6, 1993·14 cites·25 claims
- 3157US7526352B2Semiconductor production systemHITACHI LTD·Filed 2008·Granted Apr 28, 2009·0 cites·6 claims
- 3257US5658115ATransfer apparatusHITACHI LTD·Filed 1995·Granted Aug 19, 1997·22 cites·6 claims
- 3355US4282469APositioning control systemHITACHI LTD·Filed 1980·Granted Aug 4, 1981·15 cites·11 claims
- 3454US4739161AFine displacement transducer employing plural optical fibersHITACHI LTD·Filed 1986·Granted Apr 19, 1988·14 cites·7 claims
- 3554US4153341AAutomatic focusing apparatusHITACHI LTD·Filed 1977·Granted May 8, 1979·12 cites·25 claims
- 3654US2007027569A1Semiconductor production systemNAYA HIDEMITSU·Filed 2006·Application pending·0 cites
- 3753US5971701ASemiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor deviceHITACHI LTD·Filed 1997·Granted Oct 26, 1999·15 cites·7 claims
- 3851US6524961B1Semiconductor device fabricating methodHITACHI LTD·Filed 1999·Granted Feb 25, 2003·14 cites·35 claims
- 3949US7026245B2Polishing agent and polishing methodRENESAS TECH CORP·Filed 2003·Granted Apr 11, 2006·1 cites·23 claims
- 4047US6676496B2Apparatus for processing semiconductor wafersHITACHI LTD·Filed 2001·Granted Jan 13, 2004·2 cites·10 claims
- 4147US6221773B1Method for working semiconductor waferHITACHI LTD·Filed 1996·Granted Apr 24, 2001·12 cites·16 claims
- 4245US2005119843A1Semiconductor production systemFiled 2004·Application pending·0 cites
- 4342US7166013B2Polishing apparatus and method for producing semiconductors using the apparatusHITACHI LTD·Filed 2004·Granted Jan 23, 2007·1 cites·6 claims
- 4441US4045141APhotoelectric microscopeHITACHI LTD·Filed 1976·Granted Aug 30, 1977·5 cites·12 claims
- 4541US2002068452A1Polishing agent and polishing methodFiled 2000·Application pending·0 cites
- 4640US7137866B2Polishing apparatus and method for producing semiconductors using the apparatusHITACHI LTD·Filed 2005·Granted Nov 21, 2006·0 cites·4 claims
- 4740US6612912B2Method for fabricating semiconductor device and processing apparatus for processing semiconductor deviceHITACHI LTD·Filed 1999·Granted Sep 2, 2003·8 cites·33 claims
- 4839US4818351AMethod for the surface treatment of an iron or iron alloy articleTOYODA CHUO KENKYUSHO KK·Filed 1987·Granted Apr 4, 1989·7 cites·20 claims
- 4935US2003199238A1Polishing apparatus and method for producing semiconductors using the apparatusFiled 2002·Application pending·0 cites
- 5033US4804445AMethod for the surface treatment of an iron or iron alloy articleTOYODA CHUO KENKYUSHO KK·Filed 1987·Granted Feb 14, 1989·3 cites·14 claims
Showing the top 50 of 51 patent records by PatentIndex Score.
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